3D Electronic Module Fabrication via Insulating Resin Grooves

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Solution Overview

Problem

Existing methods for connecting electronic components to substrates in 3D modules often result in component breakage due to excessive ultrasound energy and thermal expansion differences, leading to difficult connections and substrate bending.

Innovation Solution

A collective fabrication method involving a silicon sheet with insulating grooves and resin-coated components, where wafers are stacked and interconnected through metallized holes drilled perpendicularly, ensuring electrical insulation and minimizing expansion issues during polymerization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If ultrasound energy is used to connect component terminals to substrate terminals, then electrical connections are established, but the energy causes component breakage

Engineering Contradiction:
Improveconnection reliabilityVSAvoidcomponent strength
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent introduces an intermediate material layer between the component and substrate that facilitates the connection process. This intermediate layer acts as a mediator that reduces the direct mechanical stress and ultrasound energy impact on the component terminals, thereby preventing breakage while still enabling reliable electrical connections.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent modifies the physical and chemical parameters of the connection interface by controlling the material properties, surface characteristics, and thermal expansion coefficients of the intermediate layer. These parameter changes optimize the connection process to reduce energy requirements and prevent component damage during ultrasound bonding.

Inventive Principle:
Principle #35Parameter changes

2Use of energy by stationary object

If the substrate is heated to soften it for connection, then the substrate absorbs ultrasound energy, but the connection becomes very difficult

Engineering Contradiction:
Improveultrasound energy absorptionVSAvoidconnection ease
Core Design Contradiction:
Use of energy by stationary objectVSEase of manufacture

Solution Approach 1:

The patent changes the thermal and mechanical parameters of the substrate and intermediate layer to achieve optimal connection conditions. By controlling the glass transition temperature, softening point, and viscosity of the intermediate material, the process enables effective ultrasound energy absorption without making the connection excessively difficult.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If components are coated by polymerization at approximately 150°, then the components are insulated, but the substrate bends due to expansion coefficient differences

Engineering Contradiction:
Improveelectrical insulationVSAvoidsubstrate shape
Core Design Contradiction:
ReliabilityVSShape

Solution Approach 1:

The patent explicitly addresses thermal expansion coefficient matching between the intermediate layer, substrate, and component materials. By selecting materials with compatible expansion coefficients, the patent prevents differential expansion during polymerization at 150°C, thereby maintaining substrate flatness while achieving proper electrical insulation.

Inventive Principle:
Principle #37Thermal expansion

Solution Approach 2:

The patent employs composite material structures where the intermediate layer is formulated as a composite with specific thermal and mechanical properties. This composite structure allows tuning of the expansion coefficient to match both the substrate and component materials, preventing warpage during the polymerization process.

Inventive Principle:
Principle #40Composite materials

4Productivity

If collective fabrication is used to assemble multiple wafers, then productivity increases, but manufacturing complexity increases

Engineering Contradiction:
Improvefabrication productivityVSAvoidfabrication process complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent merges multiple fabrication operations into a single collective process. By simultaneously assembling and connecting multiple wafers in one operation rather than processing them individually, the patent achieves high productivity while the standardized unified process actually reduces overall manufacturing complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent employs universal intermediate layer materials and standardized connection procedures that work across different wafer types and configurations. This multi-functional approach allows the same process to handle various component-substrate combinations, simplifying the fabrication process while maintaining high throughput.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method maintains material continuity and avoids expansion differences, enabling reliable electrical connections between wafers while preventing component breakage and substrate bending, facilitating efficient assembly of 3D electronic modules.

Implementation Method 1

the components being coated with an insulating resin which also fills the grooves

Methodology Applied
Scientific EffectPolymerization: Photopolymerisation

Implementation Method 2

a thinning step by surface grinding of the other face of the sheet so as to reveal the resin of the grooves

Methodology Applied
Scientific EffectAbrasion: Abrasion

Implementation Method 3

One method involves directly connecting the terminals of the component to those of the insulating substrate by sending ultrasounds. The energy sent is proportional to the number of terminals to be connected.

Methodology Applied
Scientific EffectUltrasonic vibration: Ultrasonic Vibration

Implementation Method 4

when the components are coated by polymerization performed at approximately 150°, the substrate tends to bend because the expansion coefficient of the components differs from that of the substrate

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS7877874B2Process for the collective fabrication of 3D electronic modules
Publication Date: 2011.02.01 3D PLUS CO
  • US7877874B2 patent drawing
  • US7877874B2 patent drawing
  • US7877874B2 patent drawing

AI summary

The invention relates to the collective fabrication of n 3D modules. A batch of n wafers I are fabricated on one and the same plate. This step is repeated K times. The K plates are stacked. Plated-through holes are formed in the thickness of the stack. These holes are intended for connecting the slices together. The stack is cut in order to obtain the n 3D modules. The plate 10, which comprises silicon, is covered on one face 11 with an electrically insulating layer forming the insulating substrate. This face has grooves 20 that define n geometrical features, which are provided with an electronic component 1 connected to electrical connection pads 2′ placed on said face.