3D Sample Mapping for Safe Charged Particle Microscope Positioning
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Solution Overview
Problem
Positioning samples in a charged particle microscope is time-intensive and prone to error, requiring careful alignment to avoid contact with microscope components, which can lead to astigmatism, misalignment, or damage.
Innovation Solution
The method involves illuminating a sample within a vacuum chamber from one side, detecting 2D projections from the opposite side, generating a 3D map based on these projections, and positioning the sample for imaging within the chamber using this map.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual positioning and focusing is performed by operator, then sample alignment can be adjusted, but time consumption increases and error risk increases
Solution Approach 1:
The system performs self-positioning and self-focusing by automatically generating a 3D map from multiple 2D projections and using this map to calculate the optimal imaging location, eliminating the need for manual operator intervention in positioning and focusing tasks
Solution Approach 2:
The manual mechanical positioning and focusing operations are replaced by an automated optical measurement system that captures 2D projections, generates 3D maps computationally, and determines sample locations algorithmically
2Ease of operation
If manual positioning is performed by inexperienced operator, then operation simplicity increases, but sample damage risk increases
Solution Approach 1:
The system protects itself and the sample by automatically generating 3D maps and calculating safe imaging locations that avoid pole pieces and other components, eliminating the need for operator skill in avoiding collisions
Solution Approach 2:
The system uses feedback from multiple 2D projection measurements to build an accurate 3D model of the sample and its environment, enabling intelligent decision-making about safe positioning and focusing without manual intervention
3Quantity of substance
If multiple samples of differing heights are retained on sample holder, then sample capacity increases, but positioning complexity increases
Solution Approach 1:
The system automatically handles the complexity of positioning multiple samples of varying heights by generating individual 3D maps for each sample and calculating unique imaging locations for each, eliminating the need for manual adjustment of each sample's position and focus
Solution Approach 2:
The system transitions from 2D planar positioning to 3D spatial mapping, allowing samples at different heights and positions to be accurately localized and imaged by calculating their three-dimensional coordinates from multiple projection angles
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time and skill required for sample positioning, minimizes the risk of sample or component damage, and enhances the accuracy of sample alignment within the microscope.
Implementation Method 1
directing a collimated beam to the sample
Implementation Method 2
The telecentric optical system can include an objective lens that is situated within or outside of the vacuum chamber
Data Source
Figure 1
Figure 2
Figure 3A~4B
AI summary
Situating samples on an optical axis of a charged particle microscope can be performed based a 3D map of the samples. The 3D map is produced with back-side illumination of the samples and telecentric imaging to produce profile images. The profile images are a combined to form the 3D map. Using the 3D map, the processor is coupled to a sample stage to situate a selected sample or sample portion for imaging in the charged particle microscope. In some examples, the processor is responsive to selection of a sample using a graphical interface so that the sample stage is controlled to safely situate the selected sample without further operator intervention.