3D Stacked Substrate Package for Dense High-Speed Interconnects

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Solution Overview

Problem

Conventional semiconductor packages face issues of excess cost, decreased reliability, and large package sizes, leading to inadequate performance.

Innovation Solution

The integration of high-density 3D interconnect configurations using substrate interposers in stacked or package-on-package configurations, incorporating photonic integrated circuits for optical signal processing, and multiple substrates to enhance integration and functionality, while supporting high-speed interfacing in a reduced body size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional semiconductor packages are used, then manufacturing is simpler, but package size becomes too large

Engineering Contradiction:
Improvepackage sizeVSAvoidpackage structure
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The patent transitions from conventional 2D planar packaging to 3D stacked packaging architecture. Multiple semiconductor dies are vertically stacked and interconnected through through-silicon vias (TSVs), enabling high-density interconnection in the vertical dimension. This dimensional change reduces the lateral footprint and overall package volume while accommodating complex interconnect structures.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nested packaging where multiple semiconductor dies are stacked one on top of another, with each die containing functional circuits. The dies are nested within a common package substrate that provides mechanical support and electrical interconnection. This nesting approach maximizes space utilization and reduces package size.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Quantity of substance

If conventional interconnection methods are used, then manufacturing is easier, but interconnection density is low

Engineering Contradiction:
Improveinterconnection densityVSAvoidmanufacturing complexity
Core Design Contradiction:
Quantity of substanceVSEase of manufacture

Solution Approach 1:

The patent employs three-dimensional vertical interconnection through TSVs that penetrate through the silicon substrate thickness. This vertical routing in the Z-dimension enables high-density interconnection between stacked dies, dramatically increasing the number of interconnects per unit area compared to conventional planar routing methods.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent divides the semiconductor package into multiple discrete functional dies that are separately manufactured and then stacked. Each die can be independently optimized and manufactured, allowing parallel production. The segmentation enables modular assembly and facilitates high-density interconnection through standardized interfaces between dies.

Inventive Principle:
Principle #1Segmentation

3Volume of moving object

If package size is reduced, then integration is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvepackage sizeVSAvoidalignment precision
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The patent incorporates alignment marks and reference structures during the die fabrication process. These preliminary features are built into each die before stacking, enabling precise alignment during the assembly process. The preliminary action of creating alignment references simplifies the subsequent stacking and bonding operations, maintaining manufacturing feasibility despite reduced package dimensions.

Inventive Principle:
Principle #10Preliminary action

4Adaptability or versatility

If more substrates are integrated, then functionality is enhanced, but device complexity increases

Engineering Contradiction:
Improveintegration functionalityVSAvoidsubstrate configuration
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent designs the package substrate to serve multiple functions simultaneously: mechanical support for stacked dies, electrical interconnection through TSVs, thermal management pathway, and alignment reference system. This multi-functionality reduces the need for separate dedicated structures, managing complexity while enhancing integration capabilities.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent combines multiple functional elements into integrated structures. For example, the package substrate integrates interconnect pathways, mechanical support features, and thermal conduction paths into a single unified component. This merging approach reduces the total number of discrete parts and simplifies the overall device architecture while maintaining enhanced functionality.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS20260090474A1Electronic devices and methods of manufacturing electronic devices
Publication Date: 2026.03.26 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US20260090474A1 patent drawing
  • US20260090474A1 patent drawing
  • US20260090474A1 patent drawing

AI summary

In one example, an electronic device includes a first substrate and a second substrate. The first substrate includes a substrate first side, a substrate second side, and a first conductive structure. An inner electronic component is coupled to the first conductive structure proximate to the substrate second side. An outer electronic component is coupled to the first conductive structure proximate to the substrate first side. The outer electronic component includes a body and a groove in the body configured to couple with an external interconnect. Inner interconnects couple the first substrate to the second substrate. The first substrate, the second substrate, the inner electronic component, and the outer electronic component are in a stacked configuration. The inner electronic component is interposed between the first substrate and the second substrate. Other examples and related methods are also disclosed herein.