Acceleration Sensor Mass Body Segmentation for Noise Reduction
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Solution Overview
Problem
Current acceleration sensors for reflection seismic surveys face challenges in achieving low noise and high sensitivity to detect small vibration accelerations, which are essential for exploring underground resources effectively.
Innovation Solution
The acceleration sensor design includes a substrate with a mass body divided into heavyweight and lightweight sections, connected by a beam, featuring through-holes and opening portions to optimize the mass distribution and reduce interaction with gas, thereby enhancing sensitivity and reducing noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the mass of the lightweight section is reduced by providing concave portions or offsets, then the sensitivity is improved, but the mechanical noise increases
Solution Approach 1:
The mass body is divided into multiple sections (first lightweight section, first heavyweight section, second lightweight section, second heavyweight section) with different mass characteristics. This segmentation allows each section to be optimized independently - lightweight sections for sensitivity while heavyweight sections provide stability and reduce mechanical noise, resolving the contradiction between sensitivity improvement and noise reduction.
Solution Approach 2:
Different sections of the mass body are given different mass qualities - some sections are made lightweight (with smaller mass) to improve sensitivity, while other sections are made heavyweight (with larger mass) to reduce mechanical noise. This local differentiation of mass properties allows simultaneous optimization of both sensitivity and noise characteristics.
2Measurement precision
If the mass body is made lighter to improve sensitivity, then the response to small vibrations is enhanced, but the noise level increases
Solution Approach 1:
The mass body is segmented into lightweight and heavyweight sections, allowing the overall structure to achieve low noise while maintaining high sensitivity. The lightweight sections respond to small vibrations, while heavyweight sections provide stability and reduce noise, thereby improving the signal-to-noise ratio without excessive lightening.
Solution Approach 2:
The mass body employs an asymmetric mass distribution with alternating lightweight and heavyweight sections rather than a uniform structure. This asymmetric design optimizes the balance between sensitivity (achieved by lightweight sections) and noise reduction (achieved by heavyweight sections), improving the signal-to-noise ratio.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration results in an acceleration sensor with improved signal-to-noise ratio, enabling the detection of small vibration accelerations with higher sensitivity and reduced mechanical noise, making it suitable for reflection seismic surveys.
Implementation Method 1
a first capacitive element comprising the first movable electrode and the first fixed electrode; and a second capacitive element comprising the second movable electrode and the second fixed electrode
Data Source
AI summary
There is provided an acceleration sensor with low noise and high sensitivity. Specifically, a first number of opening portions are formed in a region corresponding to a heavyweight section of a mass body, on a surface of a membrane layer, and a second number of opening portions are formed in a region corresponding to the heavyweight section of the mass body, on a back surface of the membrane layer. The opening portion and the opening portion are connected to each other to form a plurality of through portions on the membrane layer, and the first number is larger than the second number.