Acoustic Wave Filter Layout With Low-Permittivity Dielectric Isolation

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Solution Overview

Problem

Acoustic wave filter devices face a decrease in filter characteristics due to parasitic capacitance caused by impedance mismatching and electromagnetic interference, resulting from a close distance between functional elements and electrodes with high permittivity substrates.

Innovation Solution

Incorporating a dielectric portion with lower permittivity than the piezoelectric substrate between the functional elements and electrodes to reduce parasitic capacitance, thereby maintaining or improving filter characteristics by minimizing impedance mismatching and electromagnetic coupling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the distance between the functional element and the electrode is reduced to improve coupling efficiency, then the device size is minimized, but parasitic capacitance increases causing impedance mismatching and filter characteristic degradation

Engineering Contradiction:
Improvedevice sizeVSAvoidfilter characteristics
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

A dielectric portion with lower permittivity than the piezoelectric substrate is introduced as an intermediary between the functional element and the electrode. This intermediate layer reduces the parasitic capacitance formed between the electrode and functional element while allowing the electrode to remain close to the functional element for efficient coupling, thus resolving the contradiction between miniaturization and filter characteristic maintenance

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The dielectric portion is selectively positioned only in the region between the electrode and functional element where parasitic capacitance occurs, rather than uniformly across the entire device. This localized application of different dielectric properties reduces parasitic capacitance precisely where needed without compromising overall device performance or size

Inventive Principle:
Principle #3Local quality

2Reliability

If a substrate with high permittivity is used to improve acoustic wave confinement, then the acoustic wave filter performance is enhanced, but parasitic capacitance between the electrode and functional element increases

Engineering Contradiction:
Improveacoustic wave filter performanceVSAvoidparasitic capacitance
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent maintains the high permittivity piezoelectric substrate for acoustic wave confinement while introducing a localized low permittivity dielectric portion only in the region between the electrode and functional element. This spatial differentiation of dielectric properties allows the substrate to provide acoustic wave confinement benefits while the localized dielectric portion reduces parasitic capacitance in the critical coupling region

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The dielectric portion effectively reduces parasitic capacitance, preventing a decrease in filter characteristics and maintaining isolation and return loss, thus enhancing the performance of acoustic wave filter devices.

Implementation Method 1

a distance between the second functional element and an electrode for the first functional element provided to the substrate at which the second functional element is disposed is reduced, such that an unnecessary parasitic capacitance may be generated therebetween

Methodology Applied
Scientific EffectParasitic capacitance: Capacitance

Implementation Method 2

The dielectric portion is located between the first functional element and the first electrode and has a permittivity lower than a permittivity of the first piezoelectric substrate

Methodology Applied
Scientific EffectPermittivity: Dielectric Permittivity

Implementation Method 3

a first piezoelectric substrate including a first principal surface and a second principal surface, a first functional element on the first principal surface

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS20240364307A1Acoustic wave filter device
Publication Date: 2024.10.31 MURATA MFG CO LTD
  • US20240364307A1 patent drawing
  • US20240364307A1 patent drawing
  • US20240364307A1 patent drawing

AI summary

A duplexer includes a piezoelectric substrate including an upper surface and a lower surface, a functional element on the lower surface, a flat plate electrode on a side of the upper surface of the piezoelectric substrate, and a dielectric portion that is located between the functional element and the flat plate electrode and has a permittivity lower than a permittivity of the piezoelectric substrate.