Acoustic Transduction Unit With Hollowed-Out Pattern
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Solution Overview
Problem
Current ultrasonic sensors face challenges with low sound pressure emission, which affects their sensing performance in various applications.
Innovation Solution
An acoustic transduction unit is designed with a substrate, first and second electrodes, and a vibrating film, featuring a hollowed-out pattern in the vibrating film that increases vibration displacement under an electric or magnetic field, enhancing sound pressure emission. The pattern is formed in a discontinuous manner around the overlapping region, and a corrosion barrier and passivation layer are used to protect the electrodes and facilitate cavity formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a conventional solid vibrating film structure is used, then the structure is simple and easy to manufacture, but the sound pressure emission is low
Solution Approach 1:
The vibrating film is designed with a hollowed-out pattern creating a porous structure with multiple air cavities. This porous configuration allows the vibrating film to displace more air volume during vibration, significantly increasing sound pressure emission while maintaining structural integrity through the distributed cavity arrangement.
Solution Approach 2:
The vibrating film is segmented into multiple regions by the hollowed-out pattern, creating discrete air cavities distributed throughout the film. This segmentation allows different portions of the film to vibrate independently, enhancing overall vibration displacement and sound pressure output without requiring a complete structural redesign.
2Power
If the hollowed-out pattern is formed in the vibrating film, then the vibration displacement increases and sound pressure improves, but the manufacturing process becomes more complex
Solution Approach 1:
The hollowed-out pattern is formed in the vibrating film before final assembly and testing. This preliminary structuring allows the vibrating film to be pre-optimized for maximum vibration displacement, and the pattern can be created using standard photolithography and etching processes without requiring complex post-processing steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The increased vibration displacement significantly improves the emission sound pressure by 38% compared to conventional structures, enhancing the sensing performance of the acoustic transduction unit.
Implementation Method 1
a first electrode, a vibrating film and a second electrode sequentially arranged on the substrate... orthographic projections of the first electrode, the cavity, the vibrating film and the second electrode on the substrate are at least partially overlapped with each other
Implementation Method 2
a hollowed-out pattern is formed in the vibrating film, and an orthographic projection of the hollowed-out pattern on the substrate and the orthographic projection of the cavity on the substrate are overlapped with each other
Implementation Method 3
The increased vibration displacement significantly improves the emission sound pressure by 38% compared to conventional structures
Data Source
AI summary
The present disclosure provides an acoustic transduction unit, a manufacturing method thereof and an acoustic transducer. The acoustic transduction unit includes a substrate, and a first electrode, a vibrating film and a second electrode sequentially arranged on the substrate, a cavity is formed between the first electrode and the vibrating film, orthographic projections of the first electrode, the cavity, the vibrating film and the second electrode on the substrate are at least partially overlapped with each other at a first overlapping region, and a hollowed-out pattern is formed in the vibrating film, and the orthographic projection of the hollowed-out pattern on the substrate and the orthographic projection of the cavity on the substrate are overlapped with each other, and the orthographic projection of the hollowed-out pattern on the substrate is distributed in a discontinuous manner around the first overlapping region.