Active-Electrode CMOS Biosensor Array for VLSI DNA Sequencing
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Solution Overview
Problem
Existing electro-analytical biosensors are not compatible with semiconductor Very Large Scale Integration (VLSI) manufacturing processes, limiting their integration, miniaturization, cost-efficiency, and robustness.
Innovation Solution
Development of Complementary Metal Oxide Semiconductor (CMOS) biosensors fabricated using VLSI manufacturing processes, incorporating active-electrode biosensors that are compatible with VLSI, enabling high-performance and highly-parallel DNA sequencing platforms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If existing electro-analytical biosensors are used, then detection sensitivity is achieved, but compatibility with VLSI manufacturing processes is lost
Solution Approach 1:
The patent replaces traditional electro-analytical sensing mechanisms with a field-effect transistor (FET) based detection system. The FET sensor detects analyte binding events through changes in electrical field effects at the semiconductor-electrolyte interface, enabling compatibility with standard CMOS VLSI manufacturing processes while maintaining high detection sensitivity through electronic transduction mechanisms
Solution Approach 2:
The patent changes the fundamental detection parameter from electro-analytical measurements (current, impedance) to field-effect electrical characteristics (gate voltage, channel current modulation). This parameter transformation allows the sensor to be fabricated using semiconductor processing techniques while preserving the ability to detect molecular interactions with high sensitivity
2Productivity
If biosensors are miniaturized for high integration, then detection throughput increases, but manufacturing complexity increases
Solution Approach 1:
The patent designs a universal FET-based sensor platform that can detect multiple types of analytes (DNA, proteins, small molecules) using the same fundamental detection mechanism and fabrication process. This universality allows high-throughput parallel detection across numerous sensors without proportionally increasing manufacturing complexity, as all sensors follow the same design and fabrication paradigm
Solution Approach 2:
The patent divides the sensing function into modular components: the FET transistor structure, the biorecognition element, and the electronic readout circuitry. This segmentation allows independent optimization of each component and enables parallel fabrication of multiple sensors using standard semiconductor batch processing techniques, increasing throughput while controlling complexity
3Ease of manufacture
If VLSI manufacturing processes are adopted, then cost-efficiency and robustness improve, but integration with traditional biosensor designs is difficult
Solution Approach 1:
The patent replaces traditional biosensor construction methods (surface assembly of biomolecules on electrodes) with a semiconductor fabrication approach where the sensing element is an integrated FET device. This substitution enables manufacturing using proven VLSI processes, reducing costs and improving robustness while the FET's electrical field sensitivity maintains adaptability to various biorecognition applications
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The CMOS biosensors offer amenability to VLSI integration, miniaturization capabilities, lower noise performance, and increased detection dynamic range, facilitating advanced applications in nucleic acid sequencing and forensics.
Implementation Method 1
subjecting the template nucleic acid molecule to the polymerization reaction under conditions that are sufficient to yield a nucleic acid strand that is complementary to the template nucleic acid molecule
Data Source
AI summary
A method and device for performing DNA sequencing and extracting structural information from unknown nucleic acid strands. The device includes a microwell structure, where identical DNA strands are immobilized within the microwell structure on a surface of a micro-bead, an active electrode or a porous polymer. The device further includes a CMOS-integrated semiconductor integrated circuit, where the CMOS-integrated semiconductor integrated circuit includes metal layers on a silicon substrate, where the metal layers form an active electrode biosensor. In addition, a sensing electrode is formed by creating openings in a passivation layer of the CMOS-integrated semiconductor integrated circuit to hold a single bead, on which the DNA strands are immobilized.