Active Gas Generation Electrode Segmentation for Metal Contamination Control
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Solution Overview
Problem
Existing active gas generation apparatuses face issues with metal contamination due to anomalous discharge, which degrades the quality of generated active gas, as the discharge and voltage application spaces are not adequately separated, leading to mixing of evaporated metal components with the material gas.
Innovation Solution
The apparatus separates the alternating-current voltage application space from the discharge space using auxiliary members with independent material gas flow paths, preventing direct mixing of evaporated materials and reducing the likelihood of anomalous discharge by accurately setting gap lengths and enhancing electrode strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If alternating-current voltage is applied to one electrode and the other is set to ground level, then active gas can be generated through discharge, but metal contamination occurs due to insulation breakdown in spaces other than the discharge space
Solution Approach 1:
The apparatus is divided into distinct functional spaces: a discharge space for active gas generation and a voltage application space for electrical connection. The first auxiliary member (cover) physically segments these spaces, preventing metal evaporation from the voltage application terminals from contaminating the discharge space while maintaining both functions independently
Solution Approach 2:
The voltage application terminals and their associated metal components are extracted from the discharge space and placed in a separate voltage application space. This extraction removes the source of metal contamination (evaporated metal constituents) from the discharge environment, eliminating the harmful effect while preserving the discharge function
2Reliability
If insulation distance is provided to prevent breakdown, then anomalous discharge is reduced, but the apparatus structure becomes more complex
Solution Approach 1:
The cover serves multiple functions simultaneously: it provides the first auxiliary member for voltage application, creates the segmentation between spaces, provides insulation, and maintains structural integrity. This merging of functions reduces the need for additional separate insulation components, simplifying the overall structure while maintaining reliable insulation prevention
3Device complexity
If discharge space and voltage application space are not separated, then device complexity is reduced, but evaporated materials mix with material gas causing contamination
Solution Approach 1:
The apparatus is divided into distinct functional spaces: a discharge space for active gas generation and a voltage application space for electrical connection. The first auxiliary member (cover) physically segments these spaces, preventing metal evaporation from the voltage application terminals from contaminating the discharge space while maintaining both functions independently
Solution Approach 2:
The first auxiliary member (cover) acts as an intermediary barrier between the voltage application space and the discharge space. It provides a physical separation that prevents direct mixing of evaporated materials with the material gas while still allowing the apparatus to function as an integrated system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This separation effectively avoids metal contamination, ensuring high-quality active gas production by preventing the mixing of evaporated materials with the discharge gas and reducing the occurrence of anomalous discharges, while also simplifying the design and reducing costs.
Implementation Method 1
obtain active gas through energy of discharge caused by applying high voltage between the electrodes
Implementation Method 2
the distance between the power supply part and a ground part is sufficiently provided to prevent insulation breakdown of gas in the space
Implementation Method 3
employs a structure in which insulators are inserted and sealed at outer edge parts of electrode components facing each other. This structure is intended to prevent anomalous discharge from a discharge part to a housing
Data Source
Figure 1
Figure 2
Figure 3(a)~3(d)
AI summary
The present invention is intended to provide an active gas generation apparatus capable of generating high quality active gas. The present invention has features (1) to (3). The feature (1) is that "an active gas generation electrode group (300) is formed in such a manner that a ground side electrode component (2X) supports a high-voltage side electrode component (IX)". The feature (2) is that "stepped parts (115H, 115M, 115L) are provided in a discharge space outside region of a dielectric electrode (110) in the high-voltage side electrode component (IX), and project downward, and by a formation height (S15) of these stepped parts, the gap length of a discharge space (68) is defined". The feature (3) is that "the high-voltage side electrode component (1X) and the ground side electrode component (2X) are formed to have the thickness of a discharge space formation region (R68) relatively thin and the thickness of a discharge space outside region relatively thick".