Active Pixel Sensor Readout for Co-Registered Beam Analysis
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Solution Overview
Problem
Conventional charged particle beam systems require separate detectors for unidimensional and multidimensional data collection, leading to time lags, registration issues, and increased maintenance due to multiple components.
Innovation Solution
A single active pixel control sensor with dual readout circuits processes both unidimensional and multidimensional data simultaneously, enabling co-registered imaging and structural data acquisition without detector swapping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate detectors are used for unidimensional and multidimensional data collection, then both types of data can be collected, but time lags and registration issues occur between the two data sets
Solution Approach 1:
The patent combines two separate detectors into a single detector that has both unidimensional readout capability and multidimensional readout capability. This merging eliminates the time lags and registration issues that occur when using separate detectors, as both types of data are now collected simultaneously by the same device without requiring detector swapping or sequential measurement.
Solution Approach 2:
The single detector is designed with multi-functionality, capable of performing both unidimensional data collection (for imaging) and multidimensional data collection (for structural information). This universal detector replaces the need for multiple specialized detectors, enabling simultaneous operation and eliminating the time loss associated with switching between different detection modes.
2Adaptability or versatility
If separate detectors are used for unidimensional and multidimensional data collection, then both data types can be obtained, but system complexity and maintenance requirements increase
Solution Approach 1:
The patent merges the functionality of multiple detectors into a single integrated detector system. This reduces device complexity by eliminating redundant components while maintaining the versatility to collect both unidimensional and multidimensional data. The single detector with multiple readout circuits is simpler than managing multiple separate detectors with their各自的 readout systems.
Solution Approach 2:
The detector is designed as a universal device that can perform multiple detection functions. By making the detector multi-functional, the system achieves high adaptability for different data collection modes without increasing complexity, as the same hardware platform handles both unidimensional and multidimensional measurements.
3Measurement precision
If detector swapping is performed between unidimensional and multidimensional measurements, then different data types can be collected, but acquisition time increases
Solution Approach 1:
The patent combines the capabilities of detectors that would otherwise require swapping into a single detector with multiple readout circuits. This eliminates the time-consuming detector swapping process entirely, as the single detector can simultaneously provide both unidimensional and multidimensional data streams without any mechanical intervention or reconfiguration.
Solution Approach 2:
The single detector enables continuous simultaneous acquisition of both unidimensional and multidimensional data without interruption for detector swapping. The useful action of data collection continues uninterrupted, with both data types being generated concurrently by the same detector, thereby maximizing productivity while maintaining measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances image quality, reduces acquisition time, simplifies system architecture, and lowers maintenance costs by using a single detector for both imaging and structural data, while allowing real-time drift correction and improved signal-to-noise ratio.
Implementation Method 1
Each pixel in the plurality of pixels produces at least an electron and a hole upon being struck by a charged particle
Data Source
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AI summary
Systems and methods taught herein utilize a single detector to provide both unidimensional data (e.g., for direct topographical imaging) and multidimensional data (e.g., for crystallographic data) for a sample (202) that is interrogated with a charged particle beam (228). In some examples, unidimensional data can include signal intensity due to backscattered electrons received across the entire detector surface while multidimensional data can include signal intensity due to backscattered electrons as a function of pixel position. By obtaining unidimensional data and multidimensional data from a single detector, the unidimensional data and multidimensional data can be obtained at a same location, at a same time, or both at the same location and same time.