Continuous Active Region Isolation for Leakage Current Reduction

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Solution Overview

Problem

Integrated circuits (ICs) face challenges in reducing leakage current, which increases power consumption due to floating gate structures over continuous active regions and metal over diffusion layers connecting different power domains, leading to unwanted current flow between regions.

Innovation Solution

Incorporating isolation structures, such as those manufactured in a continuous or common poly on oxide diffusion edge (CPODE) process, and using cut metal over diffusion (CMD) patterns to separate metal layers, thereby reducing leakage current by isolating active regions and preventing current flow between them.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If continuous active regions are employed to increase component density, then device density and functionality are improved, but leakage current increases due to floating gate structures and metal over diffusion layers connecting different power domains

Engineering Contradiction:
Improvecomponent densityVSAvoidleakage current
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The continuous active region is segmented into multiple discrete active regions by introducing isolation structures (such as deep trench isolation or diffusion barriers) between adjacent active regions. This segmentation interrupts the continuous conductive path that causes leakage current while preserving the high-density layout benefits. The gate structures are also segmented or isolated to prevent floating gate effects from causing leakage between adjacent transistor regions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Isolation structures serve as intermediary elements positioned between adjacent active regions and between metal over diffusion layers. These intermediaries (such as dielectric materials, deep trench isolation, or diffusion barriers) block the unwanted current flow paths while allowing the active regions to maintain their functional connectivity. The intermediaries effectively decouple the power domains without requiring complete physical separation of the high-density layout.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If metal over diffusion layers connect different power domains to provide electrical connectivity, then device functionality is improved, but unwanted current flow between power domains increases

Engineering Contradiction:
Improveelectrical connectivityVSAvoidunwanted current flow
Core Design Contradiction:
Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The metal over diffusion layers are segmented into separate sections using cut metal over diffusion (CMD) patterns or isolation structures. These segmentation features interrupt the continuous metal path between different power domains, preventing unwanted current flow while maintaining necessary electrical connectivity within each power domain. The segmentation allows independent control and isolation of different power regions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the metal over diffusion layers are given different properties through selective connectivity design. Some metal layers are made continuous in regions where power domain isolation is not needed, while being interrupted or isolated in regions where power domain separation is required. This local differentiation of connectivity properties allows the device to maintain overall functionality while blocking harmful current paths between specific power domains.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS20230369320A1Leakage current reduction for continuous active regions
Publication Date: 2023.11.16 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20230369320A1 patent drawing
  • US20230369320A1 patent drawing
  • US20230369320A1 patent drawing

AI summary

A device includes a substrate, a first well region, a second well region, and a dummy region in the substrate, where the dummy region is a non-functional region situated between the first well region and the second well region. The first well region is configured to receive a first voltage and the second well region is configured to receive a second voltage that is different than the first voltage. The device further includes an active region that extends through at least part of the first well region and at least part of the dummy region, and at least one isolation structure situated in the dummy region between a first gate structure that extends over the active region in the dummy region on one side of the at least one isolation structure and a second gate structure on another side of the at least one isolation structure.