Actuator Insulating Part Width for Electrical Breakdown Prevention
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Solution Overview
Problem
Existing optical scanning apparatus actuators face electrical breakdown risks due to insufficient insulation between electrodes when high voltages are applied, particularly when the difference in width between the insulating part and the upper wiring is not sufficient.
Innovation Solution
The actuator incorporates an insulating part with extension parts on both sides of the upper wiring, which covers the end of the lower electrode, ensuring electrical insulation and preventing contact between the upper and lower electrodes, even under high voltage conditions, using a layered configuration of inorganic and organic insulating films for enhanced insulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the insulating part width is kept close to the upper wiring width to minimize device size, then device complexity is reduced, but electrical insulation reliability deteriorates under high voltage conditions
Solution Approach 1:
The insulating part is extended in the width direction beyond the upper wiring to create lateral coverage over the lower electrode ends. This dimensional extension in the width direction provides additional insulation path without significantly increasing device area, resolving the contradiction between compact size and insulation reliability under high voltage conditions.
Solution Approach 2:
The insulating part is positioned to cover the end portions of the lower electrode before voltage application occurs. This preliminary insulation arrangement prevents potential electrical breakdown at the vulnerable interface between upper wiring and lower electrode, ensuring reliability before high voltage is applied during operation.
2Reliability
If the insulating part width is increased to ensure electrical insulation, then electrical insulation reliability is improved, but device area increases
Solution Approach 1:
The insulating part is strategically extended only at the lateral edges where the lower electrode ends are exposed, rather than uniformly increasing insulation throughout. This localized quality enhancement provides necessary insulation at critical points while minimizing overall device area increase.
Solution Approach 2:
Instead of increasing insulation thickness in the vertical direction, the solution extends the insulating part laterally in the width direction to cover lower electrode ends. This dimensional approach provides adequate insulation coverage without proportionally increasing the overall device footprint.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents electrical breakdown and ensures reliable operation by maintaining insulation integrity even when high voltages are applied, allowing for efficient scanning operations with reduced risk of electrical failure.
Implementation Method 1
a piezoelectric element provided on the lower electrode
Data Source
AI summary
An actuator includes a drive beam; a lower electrode formed on the drive beam; a piezoelectric element provided on the lower electrode; an upper electrode provided on the piezoelectric element; an upper wiring connecting the upper electrode and a wiring for supplying a voltage to the upper electrode; and an insulating part providing electrical insulation between the upper electrode and the lower electrode and formed under the upper wiring such that it covers an end of the lower electrode. The insulating part includes insulating extension parts extended on opposite sides of the upper wiring in a width direction of the upper wiring.