Piezoelectric/Electrostrictive Devices TRIZ Cases
- MEMS Contact Pads on Cap Substrate for Wafer-Level Testing
A MEMS device relocates contact pads to the cap substrate surface, enabling direct electrical access via strip conductors.
- MEMS Tip-Tilt Actuator With Piezoelectric Bending Film
Piezoelectric bending films in a MEMS actuator adjust mirror angles for optical image stabilization, reducing device size and power consumption.
- Actuator Insulating Part Width for Electrical Breakdown Prevention
Extending the insulating part width beyond upper wiring covers lower electrode ends, preventing electrical breakdown under high voltage conditions.
- Substrate Film Electrode Patterning for Adhesive Bonding
Segmented electrode patterning with cross-region adhesive tape resolves peeling risks while maintaining electrical exposure flexibility.
- S-Shaped Beam Micro Drive for Multi-Axis Resonance
A micro drive unit uses S-shaped beams to pivotally support a movable object, enabling rotation and translation across three axes through resonant frequency excitation.
- Capacitive Pressure Sensor Substrate Trench Segmentation
Trench segmentation on the substrate matches membrane deflection shapes, reducing electrode spacing changes under external forces.
- Bimorph Piezoelectric Element with Sputtered Oxide Films
Sputtered perovskite oxide films on a vibration plate substrate resolve rigidity and durability trade-offs in bimorph piezoelectric elements.
- Polymer Piezoelectric Transformer for Low-Frequency Voltage Conversion
A polymer-based piezoelectric transformer converts electrical energy to mechanical vibration and back to voltage using flexible multilayer membranes.
- MEMS Loudspeaker Deflection Element Reduces Membrane Stress
A deflection element with lower flexural rigidity than the drive element elastically deforms to transmit force.
- Lead-Free Piezoelectric Composition via Transition Metal Substitution
A lead-free piezoelectric composition substitutes titanium with transition metals to enhance electron localization and spontaneous polarization.
- MEMS Active Structure with Insulating Trench for Electrical Isolation
A layered composite method creates mechanically rigid active structures using filled trenches to achieve electrical isolation between conductive regions.
- Optical Reflection Element Joint Beam Width Design
Optical reflecting device joints feature orthogonal beam widths exceeding vibration parts to distribute stress and increase mechanical strength.
- MEMS Transmission Structure for Out-of-Plane Actuation
A micromechanical transmission structure converts lateral electrostatic force into vertical displacement of a movable element.
- Piezoelectric Ceramic Composition for Ni Electrode Co-Firing
Manganese and M4' additives prevent M4 element segregation during co-firing, maintaining high piezoelectric properties despite nickel diffusion.