MEMS Tip-Tilt Actuator With Piezoelectric Bending Film

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Solution Overview

Problem

Existing optical systems face challenges in achieving effective optical image stabilization (OIS) due to the limitations of conventional actuators in terms of size, power consumption, and precision.

Innovation Solution

A MEMS tip-tilt actuator is designed, comprising a fixed outer frame, a movable second plate, a motion control structure, and a bending film made of multi-morphic thin film with piezoelectric material. This actuator controls the precise position of the second plate through electric field application, enabling tip-tilt motion for optical image stabilization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional actuators are used for optical image stabilization, then the system can achieve basic stabilization functionality, but the device size becomes large and power consumption increases

Engineering Contradiction:

Improveoptical image stabilization effectivenessVSAvoidactuator size

Core Design Contradiction:

ReliabilityVSVolume of moving object

Solution Approach 1:

The patent replaces conventional mechanical actuators with a MEMS-based actuation system that uses piezoelectric materials and elastic deformation of thin films to achieve mirror positioning. This substitution of mechanical systems with micro-scale electro-mechanical systems directly addresses the contradiction by dramatically reducing actuator size while maintaining stabilization effectiveness

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs thin elastic films as the actuation mechanism, where piezoelectric layers are deposited on flexible substrates to create micro-scale deformations that position the mirror. This use of thin films enables the actuator to achieve the required precision in a minimal volume, resolving the size-effectiveness contradiction

Inventive Principle:

Principle #30Flexible shells and thin films

2Reliability

If conventional actuators are used for optical image stabilization, then the system can achieve basic stabilization functionality, but power consumption is high

Engineering Contradiction:

Improveoptical image stabilization effectivenessVSAvoidactuator power consumption

Core Design Contradiction:

ReliabilityVSUse of energy by moving object

Solution Approach 1:

The replacement of conventional high-power mechanical actuators with low-power MEMS piezoelectric actuators directly addresses the power consumption issue. The piezoelectric effect enables precise positioning with minimal energy input, as the material undergoes reversible deformation in response to small voltage changes, thereby resolving the contradiction between stabilization effectiveness and power usage

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If conventional actuators are used for optical image stabilization, then the system can achieve basic stabilization functionality, but positioning precision is insufficient

Engineering Contradiction:

Improvemirror position precisionVSAvoidactuator size

Core Design Contradiction:

Measurement precisionVSVolume of moving object

Solution Approach 1:

The patent segments the actuation function into multiple independent piezoelectric elements arranged in specific patterns on the thin film substrate. This segmentation allows for independent control of different regions, enabling precise positioning through differential actuation while maintaining a compact overall structure, thus resolving the precision-size contradiction

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent utilizes the piezoelectric effect to achieve large strain deformations in response to small voltage changes, thereby achieving high positioning precision through electrical parameter control rather than mechanical adjustments. This parameter-based control enables precise mirror positioning within a minimal actuator volume

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The MEMS tip-tilt actuator enhances optical image stabilization by precisely controlling the movement of the second plate, effectively compensating for camera shake and improving image quality in optical systems.

Implementation Method 1

The bending film includes a multi-morphic thin film including a piezoelectric material that is controllable by applying an electric field to generate actuation torque and bend the multi-morphic thin film

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a surface of the second plate facing the first plate is reflective

Methodology Applied

Scientific EffectLight reflection: Reflection

Data Source

PatentUS20250187904A1Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator

Publication Date: 2025.06.12 MEMS DRIVE (NANJING) CO LTD

AI summary

An optical micro-electrical-mechanical system (MEMS) unit is provided, which includes: a MEMS tip-tilt actuator; a polymer layer disposed on at least a portion of the MEMS tip-tilt actuator; and a first plate disposed on the polymer layer oppositely to the MEMS tip-tilt actuator. The MEMS tip-tilt actuator includes: an outer frame that is fixed; a second plate that is movable; a motion control structure between the outer frame and the second plate; and a bending film configured to deform the motion control structure and thereby control a precise position of the second plate.