S-Shaped Beam Micro Drive for Multi-Axis Resonance
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Solution Overview
Problem
Existing micro drive units, particularly those using gimbal structures, face challenges in achieving multi-axis drive due to size and complexity issues, limiting their ability to perform three-axis drive or more without structural changes, and existing piezoelectric drive systems do not consider further degree of freedom enhancements.
Innovation Solution
A micro drive unit designed with beams that pivotally support a movable object and are formed only in one direction, capable of rotating or translating in x-axis, y-axis, and z-axis directions by being twisted or bent at specific resonant frequencies, allowing for multi-axis drive with a simplified structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a gimbal structure with outer movable plate and multiple beams is used to achieve two-axis drive, then the drive capability is improved, but the device size and structural complexity increase
Solution Approach 1:
The patent combines multiple drive functions into a single beam structure. The S-shaped beam integrates both bending and twisting capabilities, allowing two-axis drive without requiring separate outer movable plate and multiple beams. This merging of functions reduces structural complexity while maintaining drive capability.
Solution Approach 2:
The S-shaped beam serves multiple functions simultaneously: it provides bending for one axis of rotation and twisting for another axis of rotation. This multi-functionality eliminates the need for separate structural elements, reducing overall device complexity while achieving the required drive capability.
2Adaptability or versatility
If additional degrees of freedom are added to the gimbal structure, then the drive versatility is improved, but the device size increases
Solution Approach 1:
The patent employs dynamic resonance excitation where the S-shaped beam is driven at its natural resonant frequencies. By utilizing the beam's inherent dynamic characteristics and resonant modes, the system achieves multi-axis drive without requiring additional structural elements, thereby avoiding device size increase while adding degrees of freedom.
Solution Approach 2:
The system uses vibrational resonance to achieve multi-axis drive. The S-shaped beam is excited at its bending resonant frequency for one axis and twisting resonant frequency for another axis, allowing the same structural element to provide multiple degrees of freedom without increasing device size.
3Device complexity
If piezoelectric drive with S-shaped beam is used for two-axis drive, then the structural simplicity is improved, but the capability for additional degrees of freedom is limited
Solution Approach 1:
The patent uses periodic excitation at specific resonant frequencies to unlock additional degrees of freedom. By applying periodic forces at the bending resonant frequency and twisting resonant frequency of the S-shaped beam, the system can achieve two-axis drive and potentially extend to three-axis drive, enhancing versatility without compromising structural simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the creation of a compact micro device capable of achieving multi-axis drive, increasing design freedom and microminiaturization, and expanding application possibilities, such as in MEMS light scanners, by optimizing resonant frequencies for each degree of freedom.
Implementation Method 1
the movable object being configured to rotate or translate in an x-axis direction, a y-axis direction, and a z-axis direction when the at least one pair of beams is twisted or bent at one or a plurality of resonant frequencies of the at least one pair of beams
Implementation Method 2
a one-axis micro mirror having single gimbal structure including one pair of torsion bars each connected to a support beam having unimorph structure in which upper and lower piezoelectric element layers are formed on one surface at both longitudinal ends
Data Source
AI summary
Provided is a micro drive unit, which is capable of performing multi-axis drive, the micro drive unit including: a movable object; and at least one pair of beams configured to pivotally support the movable object and formed only in one direction, the movable object being configured to rotate or translate in an x-axis direction, a y-axis direction, and a z-axis direction when the at least one pair of beams is twisted or bent at one or a plurality of resonant frequencies of the at least one pair of beams, thereby being capable of simultaneously avoiding upsizing and complication of the structure. And by incorporating the micro drive unit, a micro device capable of achieving multi-axis drive can be manufactured.