Actuator Sensor Beam Segmentation for Sensitivity
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Solution Overview
Problem
In optical scanning devices, the integration of sensor piezoelectric elements on narrow driving beams limits their ability to detect warp, as the area available for driving piezoelectric elements is compromised, affecting sensitivity and rigidity, leading to reduced sensor output.
Innovation Solution
The design incorporates a sensor beam that branches from the driving beam, allowing the sensor piezoelectric element to detect warp without sacrificing the area of the driving piezoelectric element, with the sensor beam's length being 1.5 to 2 times that of the sensor piezoelectric element, enhancing sensitivity and maintaining the driving beam's deformation capability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If the width of the driving beam and driving piezoelectric element is increased to provide sufficient area for driving, then the sensor area becomes too large relative to the sensor piezoelectric element, but this causes the sensor output to decrease due to reduced deformation
Solution Approach 1:
The beam structure is segmented into a driving beam and a sensor beam that are connected at one end. The driving beam supports the driving piezoelectric element and undergoes deformation, while the sensor beam supports the sensor piezoelectric element and transmits the deformation to the sensor. This segmentation allows each beam to be optimized independently for its specific function.
Solution Approach 2:
The sensor beam acts as an intermediary between the driving beam and the sensor piezoelectric element. It transmits the deformation from the driving beam to the sensor while maintaining the sensor's ability to detect warp effectively. The sensor beam's dimensions are specifically designed to preserve deformation characteristics.
2Area of moving object
If the width of only a portion of the driving beam on which the sensor piezoelectric element is formed is increased, then the area for the sensor is improved, but the rigidity of that portion increases and deformation decreases, reducing sensor output
Solution Approach 1:
The beam is divided into distinct driving and sensor portions connected by a joint. The sensor beam is designed with dimensions that maintain appropriate rigidity for deformation detection, while the driving beam is optimized for actuation. This segmentation prevents the rigidity problem that would occur if the entire beam width were increased.
Solution Approach 2:
Different portions of the beam structure have different dimensional characteristics optimized for their specific functions. The driving beam has dimensions suitable for actuation, while the sensor beam has dimensions that preserve deformation capability for sensing. Each portion has local quality tailored to its role.
3Adaptability or versatility
If a sensor piezoelectric element is provided in a sensor area formed by removing a portion of a narrow driving piezoelectric element, then the sensor can be integrated, but almost no area is left for the driving piezoelectric element, preventing the driving beam from warping
Solution Approach 1:
The integrated beam structure is segmented into a driving beam and a sensor beam connected at one end. This allows the driving piezoelectric element to be formed on the driving beam with sufficient area for actuation, while the sensor piezoelectric element is formed on the sensor beam for detection. Both functions are integrated in one structure without compromising either.
Solution Approach 2:
Instead of integrating the sensor and driver in the same beam width dimension (which causes area conflict), the solution extends the structure in another dimension by adding a connected sensor beam. This dimensional expansion resolves the area conflict while maintaining both driving and sensing capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively increases sensor output sensitivity and tilt angle sensitivity while maintaining the driving beam's deformation capability, optimizing the balance between sensor detection and driving performance.
Implementation Method 1
a piezoelectric element that includes an upper electrode formed on the upper surface of a piezoelectric thin film and a lower electrode formed on the lower surface of the piezoelectric thin film
Implementation Method 2
a sensor piezoelectric element that is provided on a driving beam of the MEMS structure and used to detect the movement and warp of the driving beam
Data Source
AI summary
An actuator includes a driving beam that includes a beam extending in a direction orthogonal to a predetermined axis and supports an object to be driven; a driving source that is formed on a surface of the beam and causes the object to rotate around the predetermined axis; a sensor beam that extends in a direction that is the same as the direction in which the beam extends, one end of the sensor beam being connected to a lateral side of the beam; and a sensor that is formed on a surface of the sensor beam, the surface of the sensor beam and the surface of the beam facing the same direction.