Flexible Microstructural Devices TRIZ Cases
- Micromirror Slit Support Structure for Large Deflection Scanning
Symmetric slits in micromirror connecting portions spread stress, preventing breakage while enabling large biaxial deflection in a compact scanner.
- Piezoelectric MEMS Mirror Magnetic Drive for Compact Stress-Resistant Tilting
Magnetic coupling replaces elastic drive links in a piezoelectric MEMS mirror, enabling smaller tilting structures with higher stress resistance.
- Micromirror Scan Control With Crosstalk-Aware Trajectory Estimation
Crosstalk-aware deflection estimation and synchronized light emission improve micromirror laser scanning trajectory accuracy and image quality.