Flexible Microstructural Devices TRIZ Cases

Symmetric slits in micromirror connecting portions spread stress, preventing breakage while enabling large biaxial deflection in a compact scanner.

Magnetic coupling replaces elastic drive links in a piezoelectric MEMS mirror, enabling smaller tilting structures with higher stress resistance.

Crosstalk-aware deflection estimation and synchronized light emission improve micromirror laser scanning trajectory accuracy and image quality.

A groove-shaped reflection part and paired detector outputs compensate for detector variation during optical scanning.

Vaporizing anti-stiction material inside an encapsulation chamber deposits a coating on moving micro device components.

A torsional oscillating structure mechanically couples elements via a separate plane to reduce dynamic deformation.

A ceramic substrate with high elastic modulus supports a MEMS scanning mirror actuator frame, eliminating parasite mode excitation and audible noise.

A micromirror device uses semi-annular and meandering piezoelectric actuators to generate rotational torque around two axes.

Capacitive MEMS pressure sensor uses silicon wafers joined by glass frit bonding to create a precise vacuum gap for accurate detection.

Piezoelectric optical deflector uses an impact attenuator to absorb external shocks and prevent structural breakage.

Partitioning the piezoelectric portion into grooved segments reduces stress concentration and prevents surface fractures on the drive beam.

Ribs and notches on MEMS driving beams reduce thickness displacement, stabilizing optical scanning phase in OCT applications.

Segmenting the actuator into distinct driving and sensor beams increases warp detection sensitivity while maintaining deformation capability.

An electromechanically active flexible member applies contractive force to overcome stiction, preventing micromirror damage during position changes.

An extending rib portion protrudes outward from the body edge to increase rigidity and suppress distortion while maintaining manufacturing consistency.

Actuator pairs cantilevered adjacent to scanning mirror sides utilize previously unused regions to reduce form factor while maintaining angular rotation.

Continuous rigidity gradients in elastic members suppress dynamic distortion at high scan rates, maintaining beam spot shape.

Annular piezoelectric actuators drive rotational torque around orthogonal axes to reduce energy consumption and crosstalk in scanning systems.

Piezoelectric films adjust substrate rigidity to stabilize resonance frequency and scan angle against temperature changes.

A mirror device uses segmented rib portions to suppress surface distortion while maintaining reliable swinging motion.