Oscillating Structure Reducing Dynamic Deformation

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Solution Overview

Problem

Micromechanical mirror structures experience dynamic deformation due to high oscillation frequencies, leading to aberrations in the projected image, and existing solutions either increase manufacturing complexity or dampen oscillations, making it difficult to achieve high oscillation frequencies.

Innovation Solution

The oscillating structure incorporates first and second torsional elastic elements with a moving element configured to rotate about an axis of rotation, coupled together via a structure on a different plane, reducing direct contact and increasing rigidity without increasing the surface area, thus minimizing dynamic deformation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If the thickness of the planar support is increased to increase rigidity, then the dynamic deformation is reduced, but the mass increases requiring greater actuation forces

Engineering Contradiction:
ImproverigidityVSAvoidmass
Core Design Contradiction:
StrengthVSWeight of moving object

Solution Approach 1:

The patent introduces a coupling structure positioned in a plane different from the oscillating plane of the moving element. This spatial arrangement allows the coupling structure to provide rigidity enhancement without adding mass to the oscillating components, as the coupling structure remains stationary and does not participate in the oscillation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Stability of the object's composition

If anchors are added to increase rigidity by surrounding the planar support, then the structural stability is improved, but the manufacturing complexity increases and oscillation damping increases

Engineering Contradiction:
Improvestructural stabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent extracts the rigidity-providing function from the oscillating plane and places it in a separate coupling structure positioned in a different plane. This separation eliminates the need for complex anchor structures surrounding the planar support, simplifying manufacturing while maintaining structural stability.

Inventive Principle:
Principle #2Taking out (Extraction)

3Strength

If the area of the moving portion is increased to provide rigidity, then the structural strength is improved, but the oscillation damping increases making it difficult to achieve high oscillation frequencies

Engineering Contradiction:
Improvestructural strengthVSAvoidoscillation damping
Core Design Contradiction:
StrengthVSLoss of energy

Solution Approach 1:

The coupling structure is positioned in a plane different from the oscillating plane, allowing it to provide structural strength without increasing the area of the moving portion. Since the coupling structure remains stationary, it does not contribute to oscillation damping, enabling high oscillation frequencies to be achieved.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design significantly reduces dynamic deformation and allows for higher oscillation frequencies without increasing damping, resulting in improved optical performance with reduced aberrations.

Implementation Method 1

first and second torsional elastic elements defining an axis of rotation, a moving element interposed between said first and second torsional elastic elements, the moving element being configured to rotate about an axis of rotation as a result of a twisting of the first and second torsional elastic elements

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS10914938B2Oscillating structure with reduced dynamic deformation, optical device including the oscillating structure, and method of manufacturing the oscillating structure
Publication Date: 2021.02.09 STMICROELECTRONICS SRL
  • US10914938B2 patent drawing
  • US10914938B2 patent drawing
  • US10914938B2 patent drawing

AI summary

An oscillating structure includes first and second torsional elastic elements that define an axis of rotation and a moving element that is interposed between the first and second torsional elastic elements. The moving element, the first torsional elastic element and the second torsional elastic element lie in a first plane and are not in direct contact with one another. A coupling structure mechanically couples the moving element, the first torsional elastic element and the second torsional elastic element together. The moving element, the first torsional elastic element and the second torsional elastic element lie in a second plane different from the first plane. Oscillation of the moving element occurs as a result of a twisting of the first and second torsional elastic elements.