Acute-Angle Cantilever Probe for Uniform Resolution

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Solution Overview

Problem

Conventional cantilevers for scanning probe microscopes face challenges in achieving uniform resolution due to the non-circular cross-sectional shape of probes, which can lead to varying resolution in the in-plane direction and increased probe diameter when functional films are applied, complicating film formation and reducing measurement accuracy.

Innovation Solution

A cantilever design featuring a protrusion portion with an acute apex angle, where a carbon nanofiber probe is coated with a magnetic body film, resulting in a more isotropic cross-sectional shape with a major axis/minor axis ratio of 2.0 or less, ensuring uniform resolution and preventing resolution deterioration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a functional film is coated on a conventional probe with non-circular cross-section, then the probe gains enhanced functionality (e.g., magnetic force microscopy capability), but the probe diameter increases and resolution uniformity deteriorates

Engineering Contradiction:
Improvefunctional capabilityVSAvoidresolution uniformity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The probe is designed with a circular cross-section (major axis/minor axis ratio of 0.95 or less) instead of a non-circular shape. This spherical geometry ensures that when a functional film is coated on the probe surface, the diameter increase is uniform in all directions, maintaining resolution uniformity across the probe tip while still allowing the functional film to provide its intended capability

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Adaptability or versatility

If a functional film is coated on a probe with large major axis/minor axis ratio, then the probe gains functionality, but the increased probe diameter complicates film formation and reduces measurement accuracy

Engineering Contradiction:
Improvefunctional capabilityVSAvoidmeasurement accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

By designing the probe with a circular cross-section (major axis/minor axis ratio of 0.95 or less), the probe ensures uniform film formation during the coating process. This spherical geometry prevents diameter variation that would otherwise complicate film formation and maintain measurement accuracy, while still allowing the functional film to be effectively applied

Inventive Principle:
Principle #14Spheroidality (Curvature)

3Ease of manufacture

If a probe with non-circular cross-section is used, then the probe structure is simpler to manufacture initially, but the resolution varies in the in-plane direction

Engineering Contradiction:
Improveprobe fabricationVSAvoidresolution uniformity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The probe is designed with a circular cross-section (major axis/minor axis ratio of 0.95 or less) which, while requiring precise manufacturing, ensures that the resolution is uniform in all in-plane directions. This spherical geometry eliminates the directional resolution variation inherent in non-circular probes, achieving isotropic measurement capability

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves high-resolution imaging with uniformity in the in-plane direction by reducing the major axis/minor axis ratio of the probe cross-section, allowing for precise surface measurements while maintaining a consistent probe diameter, thus enhancing the measurement accuracy and longevity of the cantilever.

Implementation Method 1

a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film

Methodology Applied
Scientific EffectFilm deposition: Deposition (physical)

Data Source

PatentUS10203354B2Cantilever for a scanning type probe microscope
Publication Date: 2019.02.12 OLYMPUS CORPORATION(JP)
  • US10203354B2 patent drawing
  • US10203354B2 patent drawing
  • US10203354B2 patent drawing

AI summary

The present invention provides a cantilever for a scanning type probe microscope, the cantilever including a support portion, a lever portion extending from the support portion, a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle, and a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film, and a major axis/minor axis ratio of a cross-sectional shape of the probe is smaller than a major axis/minor axis ratio of a cross-sectional shape of the fine wire.