Adaptive Coordinate Measuring for Substrate Orientation
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Solution Overview
Problem
Existing methods for measuring structures on a substrate with coordinate measuring machines do not adapt measuring processes to changes in substrate orientation, leading to inefficiencies in locating and measuring structures accurately across different orientations.
Innovation Solution
A method that adjusts the measuring processes based on the substrate's orientation by using a predefined method linked to the coordinate system, which includes automatic substrate orientation determination through markings and image processing, allowing the measurement table and camera to reposition accordingly to maintain accurate measurement locations across different orientations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a fixed predefined measuring method is used for substrates in original orientation, then measurement processes are simple and straightforward, but the method cannot accurately locate and measure structures when the substrate is rotated to different orientations
Solution Approach 1:
The measuring method is made dynamic by automatically adapting it to the substrate's current orientation. The system detects the substrate orientation and dynamically adjusts the measuring processes accordingly, transforming a static fixed method into a flexible adaptive one that maintains measurement accuracy across different orientations without requiring manual reconfiguration
Solution Approach 2:
The system changes the parameters of the measuring method based on the detected substrate orientation. By modifying measurement parameters according to the substrate's rotational state, the system maintains measurement precision while automatically adapting to different orientations, resolving the contradiction between accuracy and complexity
2Measurement precision
If manual reconfiguration of measuring processes is performed for each substrate orientation, then measurement accuracy can be maintained, but measurement time and productivity decrease
Solution Approach 1:
The measuring system performs self-service by automatically detecting substrate orientation and adjusting its own measuring processes without external intervention. The system independently determines the required measurement parameter changes and executes them autonomously, maintaining accuracy while eliminating time-consuming manual reconfiguration steps
Solution Approach 2:
The system implements feedback by detecting the substrate orientation and using this information to automatically adjust the measuring method. This closed-loop approach ensures measurement accuracy is maintained while the automated feedback mechanism eliminates manual intervention, thereby improving productivity
3Measurement precision
If the measuring method is adapted to each individual substrate orientation, then measurement accuracy is maintained across all orientations, but the complexity of the measuring system increases
Solution Approach 1:
The system replaces complex mechanical reconfiguration with automated computational adjustment. Instead of physically reconfiguring the measuring system for each orientation, the method uses image processing and coordinate transformation algorithms to adapt the measuring approach, reducing mechanical complexity while maintaining measurement precision
Data Source
AI summary
A method for measuring structures (3) on a substrate (2) with a coordinate measuring machine (1) is disclosed. A predefined measuring method is used for measuring at least one structure (3) on the substrate (2), wherein the measuring includes the position and/or the width of the structure (3). The predefined measuring method consists of a plurality of processes linked with the coordinate system (1a) of the coordinate measuring machine (2). The measuring method for a substrate is defined by a first orientation with respect to the coordinate system of the coordinate measuring machine (1). The predefined measuring method is applied to a second orientation of the substrate (2).