Adaptive Scanning Microscope Field Curvature Correction

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Solution Overview

Problem

Conventional optical microscopes face a trade-off between resolution and field of view, limiting their effectiveness in applications requiring high-resolution imaging of large areas, especially in micro-assembly, biological observation, and industrial inspection.

Innovation Solution

The adaptive scanning optical microscope integrates a scanner lens, a steering mirror, adaptive optics, and imaging optics to achieve a large field of view while maintaining high resolution through explicit field curvature design and image processing, using a deformable mirror to correct for residual aberrations and simplify the optical complexity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a conventional optical microscope uses a fixed objective lens, then the resolution is maintained, but the field of view is limited

Engineering Contradiction:
Improvefield of viewVSAvoidoptical system complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent implements dynamic scanning capability by replacing the fixed objective lens with a movable scanning mirror system that can rapidly reposition the optical path across different regions of the specimen. This allows the field of view to be expanded dynamically while maintaining the resolution characteristics of the objective lens through repeated scanning and image stitching.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent divides the large field of view into multiple smaller sub-fields that can be imaged sequentially by the scanning mirror. Each sub-field is captured with high resolution by the objective lens, and the individual images are then computationally stitched together to form a complete high-resolution image of the entire large area.

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If multiple microscopes are used to cover a large area, then the field of view is expanded, but the device complexity and calibration effort increase

Engineering Contradiction:
Improvefield of viewVSAvoidcalibration and repositioning effort
Core Design Contradiction:
Area of stationary objectVSEase of operation

Solution Approach 1:

The patent merges multiple microscope functions into a single microscope system by incorporating a scanning mirror mechanism that enables one objective lens to sequentially image multiple regions. This eliminates the need for multiple separate microscopes and their associated calibration procedures, while achieving the same expanded field of view through automated scanning and image stitching.

Inventive Principle:
Principle #5Merging (Combining)

3Area of stationary object

If a moving stage is used to observe large areas, then the field of view is expanded, but the specimen is disturbed and imaging speed is limited

Engineering Contradiction:
Improvefield of viewVSAvoidimage acquisition rate
Core Design Contradiction:
Area of stationary objectVSSpeed

Solution Approach 1:

Instead of moving the specimen stage to change the field of view, the patent inverts the approach by keeping the specimen stationary and moving the optical path through a scanning mirror system. This allows rapid repositioning of the imaging beam across different regions without physically disturbing the specimen, thereby maintaining both high imaging speed and specimen stability.

Inventive Principle:
Principle #13The other way round (Inversion)

4Productivity

If the scanning speed is increased for high throughput, then the productivity is improved, but the image quality may deteriorate due to motion blur

Engineering Contradiction:
Improveimage acquisition rateVSAvoidimage resolution
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent employs periodic scanning motion where the mirror rapidly moves between predefined positions in a controlled back-and-forth pattern. This periodic motion allows the system to acquire multiple images at standardized positions over time, and through computational stitching, construct a high-resolution composite image that maintains quality even at high acquisition rates.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables high-throughput imaging with fast re-positioning speeds, suitable for dynamic and low-fill-factor applications, such as biological imaging and micro-assembly, without disturbing the sample, and allows for rapid acquisition of high-quality images.

Implementation Method 1

an adaptive optics element, adaptive optics (AO) conditioning optics

Methodology Applied
Scientific EffectAdaptive optics:

Implementation Method 2

a deformable mirror to correct for residual aberrations

Methodology Applied
Scientific EffectWavefront correction:

Implementation Method 3

a scanner lens assembly for acquiring images from different parts of an object plane and for forming a preferably curved image field

Methodology Applied
Scientific EffectOptical focusing: Lens

Implementation Method 4

a steering mirror for steering light from the image field and along a light path from the object plane to an final image plane

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS7742213B2Adaptive-scanning optical microscope
Publication Date: 2010.06.22 RENESSELAER POLYTECHNIC INST
  • US7742213B2 patent drawing
  • US7742213B2 patent drawing
  • US7742213B2 patent drawing

AI summary

An adaptive scanning optical microscope has a scanner lens assembly for acquiring images from different parts of an object plane and for forming a preferably curved image field having at least some aberration which varies as a function of the part of the object plane from which the image is acquired. A steering mirror selects the field of view and steers light from the object and along a light path from the object plane to a final image plane. An adaptive optics element receives the steered light from the object and compensates for the field position dependent optical aberrations and additional optics are along at least part of the light path for conditioning and focusing the light as it moves from the steering mirror, past the adaptive optics element and to the final image plane.