Adaptive Scanning Microscope for Rapid Volume Imaging

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Scanning electron microscopes and FIB dual beam devices face significant time constraints in forming high-resolution digital images of volumes, as the data collection process can take several hours to several days, limiting research throughput and efficiency.

Innovation Solution

Implementing a method that uses initial scans to identify regions of interest and exclude non-interest areas, allowing for targeted and efficient data collection by forming a guide pixel set to determine structures of interest and adjusting scanning parameters based on pixel grayscale measurements and variance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If comprehensive scanning of the entire area is performed to ensure all structures are captured, then measurement precision is improved, but loss of time increases significantly

Engineering Contradiction:

Improvecompleteness of structure detectionVSAvoidscanning duration

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The scanning area is segmented into regions of interest and non-interest areas based on guide pixel set analysis. The method divides the comprehensive scan into targeted scans of identified structures, reducing unnecessary scanning of empty or irrelevant regions while maintaining complete detection of all structures.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A preliminary low-resolution scan is performed to create a guide pixel set that identifies potential structures of interest before the main high-resolution scan. This preliminary action allows the system to pre-determine which areas require detailed scanning, avoiding time-consuming scans of empty regions.

Inventive Principle:

Principle #10Preliminary action

2Productivity

If the scanning rate is increased to reduce imaging time, then productivity is improved, but measurement precision deteriorates

Engineering Contradiction:

Improveimaging throughputVSAvoidpixel grayscale accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The method applies different scanning qualities to different regions: high-resolution scanning is applied only to identified regions of interest where structures are located, while non-interest areas are either skipped or scanned at lower resolution. This local differentiation maintains measurement precision for structures while improving overall productivity.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

Instead of uniformly scanning the entire area at high resolution, the method performs partial scanning only of regions where structures are likely to be found, as identified by the guide pixel set. This partial action approach maintains sufficient measurement precision for structure detection while dramatically reducing total scan time.

Inventive Principle:

Principle #16Partial or excessive action

3Loss of time

If the scanning area is reduced to only regions of interest, then loss of time is reduced, but measurement precision may deteriorate if structures are missed

Engineering Contradiction:

Improvescanning durationVSAvoidstructure detection reliability

Core Design Contradiction:

Loss of timeVSReliability

Solution Approach 1:

The guide pixel set is created through preliminary scanning and analysis to identify regions of interest before the main scanning process. This preliminary action ensures that all potential structures are located and marked for scanning, making the subsequent focused scanning both time-efficient and reliable.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The method uses feedback from the guide pixel set analysis to dynamically adjust the scanning regions. The guide pixel set provides continuous feedback about where structures are located, allowing the system to reliably identify and scan only the necessary regions while maintaining high detection reliability.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces the time required to form digital images by focusing scans on regions of interest, thereby enhancing the efficiency and speed of the imaging process while maintaining high accuracy.

Implementation Method 1

performing an initial set of scans to form a guide pixel set for the area... performing additional scans of the regions representing structures of interest, to gather further data to further evaluate pixels in the regions

Methodology Applied

Scientific EffectSecondary electron emission: Cathodoluminescence

Data Source

PatentUS9041793B2Scanning microscope having an adaptive scan

Publication Date: 2015.05.26 FEI CO

AI summary

A method of using a scanning microscope to rapidly form a digital image of an area. The method includes performing an initial set of scans to form a guide pixel set for the area and using the guide pixel set to identify regions representing structures of interest in the area. Then, performing additional scans of the regions representing structures of interest, to gather further data to further evaluate pixels in the regions, and not scanning elsewhere in the area.