Adaptive Supply Voltage Control for Semiconductor Aging

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Solution Overview

Problem

Current high-volume manufacturing methods for semiconductor devices face challenges in predicting and addressing aging-related performance degradation, leading to inefficiencies and revenue loss due to fixed supply voltage settings that are not adaptive to individual part aging rates, resulting in unnecessary power consumption and accelerated aging.

Innovation Solution

Implementing a control apparatus and method that uses In-Die Variation (IDV) measurements and software to dynamically adjust the supply voltage of semiconductor devices based on individual aging progress, allowing for adaptive countermeasures against aging effects, thereby reducing the statistical guardband and improving yield and binning criteria.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a fixed supply voltage is used for semiconductor devices, then manufacturing and control are simplified, but power consumption increases and device lifespan is reduced due to accelerated aging

Engineering Contradiction:
Improvevoltage control complexityVSAvoidpower consumption
Core Design Contradiction:
Device complexityVSUse of energy by moving object

Solution Approach 1:

The patent implements dynamic supply voltage adjustment based on individual device aging characteristics. Instead of using a fixed voltage for all devices, the system continuously monitors aging parameters (such as threshold voltage shifts and carrier mobility degradation) and adapts the supply voltage in real-time to compensate for aging effects, thereby reducing power consumption while maintaining performance.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the supply voltage parameter dynamically based on measured aging characteristics. By monitoring device-specific parameters like threshold voltage (Vth) shifts and adjusting the supply voltage accordingly, the system optimizes power consumption at different stages of device life without requiring complex hardware modifications.

Inventive Principle:
Principle #35Parameter changes

2Device complexity

If a fixed supply voltage is used for semiconductor devices, then control is simplified, but device lifespan is reduced due to accelerated aging

Engineering Contradiction:
Improvevoltage control complexityVSAvoiddevice lifespan
Core Design Contradiction:
Device complexityVSDuration of action of stationary object

Solution Approach 1:

The system dynamically adjusts supply voltage based on real-time aging monitoring. By detecting aging parameters such as threshold voltage shifts and carrier mobility degradation, the system adapts the voltage to compensate for aging effects, extending device lifespan while maintaining performance levels throughout the device's operational life.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements a feedback mechanism where aging parameters are continuously monitored and used to adjust the supply voltage. The system measures device-specific aging characteristics, compares them against reference values, and automatically adjusts the voltage to compensate for degradation, creating a closed-loop control system that extends device lifespan.

Inventive Principle:
Principle #23Feedback

3Reliability

If statistical guardbands are applied to account for aging, then performance reliability is improved, but power consumption increases and yield decreases

Engineering Contradiction:
Improveperformance reliabilityVSAvoidmanufacturing yield
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent applies individualized voltage compensation to each device based on its specific aging characteristics rather than using uniform statistical guardbands for entire device populations. By measuring and compensating for device-specific parameters like threshold voltage shifts and carrier mobility degradation, the system maintains performance reliability without applying excessive guardbands that would reduce yield.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The system changes the supply voltage parameter individually for each device based on measured aging characteristics, replacing population-level statistical guardbands with device-specific adaptive voltage adjustment. This approach maintains reliability by compensating for actual device aging while avoiding the yield penalties associated with conservative statistical margins.

Inventive Principle:
Principle #35Parameter changes

4Use of energy by moving object

If device-specific aging monitoring is implemented, then power consumption is optimized and lifespan is extended, but device complexity and measurement requirements increase

Engineering Contradiction:
Improvepower consumptionVSAvoidmonitoring system complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent implements self-service aging monitoring where the semiconductor device monitors its own aging characteristics using built-in test structures and measurement circuits. The device measures its own threshold voltage shifts and carrier mobility degradation without requiring external testing equipment, enabling continuous monitoring with minimal additional complexity.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system uses multi-functional measurement circuits that serve both as test structures during manufacturing and as continuous aging monitors during operation. By designing measurement circuits that can perform multiple functions (initial characterization and ongoing aging monitoring), the patent reduces the need for separate monitoring hardware, thereby limiting the increase in device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS20220011795A1Control Apparatus, Device, Method and Computer Program for Determining a Device-Specific Supply Voltage for a Semiconductor Device
Publication Date: 2022.01.13 INTEL CORP
  • US20220011795A1 patent drawing
  • US20220011795A1 patent drawing
  • US20220011795A1 patent drawing

AI summary

Examples relate to control apparatus, a control device, a method and a computer program for determining a device-specific supply voltage for a semiconductor device, and to a corresponding semiconductor device and corresponding systems. The control apparatus is configured to obtain measurement data of measurement circuitry of the semiconductor device, the measurement data being related to a progress of aging of the semiconductor device. The control apparatus is configured to determine the device-specific supply voltage of the semiconductor device based on the measurement data. The control apparatus is configured to provide information on the device-specific supply voltage for a supply voltage control apparatus.