Adjustable Ceramic Guide for Plasma Substrate Handling
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Solution Overview
Problem
Conventional plasma treatment apparatuses face challenges in preventing abnormal discharges when using thin, deflectable resin substrates due to the brittleness of ceramic guide members and the need for multiple ceramic mounting portions, leading to mechanical failures and increased costs.
Innovation Solution
A plasma treatment apparatus with bar-shaped ceramic guide members supported by adjustable metallic supporting members, which are fixedly disposed at a right angle to the substrate transporting direction, allowing for adjustable intervals to guide the substrate's side end surfaces and prevent abnormal discharges across varying substrate widths without requiring frequent replacement or bolting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ceramic guide members are attached by bolting to the substrate mounting portion, then the guide members can be fixed in position, but the ceramic guide members are easily broken at the bolted portions and cannot withstand repeated use
Solution Approach 1:
The support structure is divided into multiple segments: a plurality of support members are arranged at predetermined intervals along the substrate transporting direction, with each support member having a first support portion and a second support portion. This segmentation distributes the mechanical stress and avoids concentration at single bolted points, preventing ceramic breakage.
Solution Approach 2:
Different portions of the support structure have different functions: the first support portion supports the guide member at a first height, while the second support portion supports it at a second height. This local differentiation allows optimization of each portion for its specific function, improving overall reliability without compromising the ceramic guide member integrity.
2Adaptability or versatility
If a ceramic-made mounting portion is prepared for each kind of substrate, then substrates of different widths can be accommodated, but the running cost increases
Solution Approach 1:
The support members are designed with universal functionality to accommodate substrates of different widths. By adjusting the positions of the first and second support portions along the substrate transporting direction, the same support structure can adapt to various substrate widths without requiring multiple different ceramic mounting portions, thereby reducing costs while maintaining versatility.
3Reliability
If the substrate guide mechanism uses bolting methods, then the guide members can be securely attached, but the ceramic guide members are easily broken and require frequent replacement
Solution Approach 1:
The support structure employs a dynamic configuration where the first and second support portions can be positioned at different heights and locations. This dynamic arrangement allows the guide members to be securely attached without rigid bolting, distributing stress more evenly and preventing ceramic breakage while maintaining ease of assembly and replacement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents abnormal discharges and stabilizes plasma treatment quality for thin-type substrates, reducing mechanical failures and costs associated with frequent ceramic replacements, while accommodating substrates of different dimensions.
Implementation Method 1
causing plasma discharge to take place in the treatment chamber
Implementation Method 2
plasma which is generated by mounting a substrate in a treatment chamber in a reduced-pressure atmosphere and by causing plasma discharge to take place
Data Source
AI summary
In a plasma treatment apparatus for performing plasma treatment by accommodating a substrate in a treatment chamber, a fixed guide 12 and a movable guide 13 made of a ceramic are arrayed in an X direction (in a substrate transporting direction) for guiding both side end portions of the substrate held on a ceramic-made mounting plate 10, and both end portions of the movable guide 13 are supported by supporting members. In this construction, these supporting members are fitted to fixed members 15A and 15B arranged in a Y direction with the mounting plate 10 placed therebetween, such that an interval in the Y direction is adjustable. Consequently, the ceramic-made guide member 13 can be mounted and demounted without directly bolting it, and it is possible to prevent the generation of an abnormal discharge by using as objects multiple product thin-type substrates with different widthwise dimensions.