Adjustable Robot End Effector for Wafer Handling
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Solution Overview
Problem
Current robotic systems for handling substrates like wafers in semiconductor and liquid crystal panel production face challenges in throughput and flexibility due to the need for multiple hands with specific functions, leading to increased operational complexity and costs, and interference issues when trying to carry multiple wafers simultaneously.
Innovation Solution
A method utilizing an end effector with movable and fixed blade members that can adjust their interval and orientation to accommodate different substrate sizes and conditions, allowing for flexible operation and independent movement of additional end effectors to enhance wafer transfer efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If two hands are fixedly provided to one robot arm with vertical interval corresponding to wafer pitch, then multiple wafers can be carried simultaneously, but the empty hand interferes with cassette and wafers during insertion
Solution Approach 1:
The patent applies dynamics by making the interval between the first and second hands adjustable rather than fixed. The hands can move relative to each other along the robot arm, allowing the system to adapt its configuration dynamically. When carrying multiple wafers, the hands are positioned at intervals corresponding to wafer pitch; when one hand is empty, it can be moved closer to avoid interfering with the cassette or wafers being inserted, thus resolving the contradiction between productivity and ease of operation.
2Productivity
If multiple robots are employed to enhance wafer transfer throughput, then productivity increases, but equipment cost increases significantly
Solution Approach 1:
The patent merges the functions of multiple robots into a single robot system by providing multiple hands (end effectors) on one robot arm. This allows one robot to perform the work of multiple robots by carrying multiple wafers simultaneously with different hands, thereby increasing throughput without proportionally increasing equipment cost. The hands can operate independently yet cooperatively under single robot control.
Solution Approach 2:
The patent applies universality by designing a single robot system that can perform multiple functions through its multiple hands. Each hand can carry wafers, and the hands can be positioned at different intervals to accommodate various wafer transfer scenarios, making the single robot universally capable of handling different throughput requirements without needing additional specialized robots.
3Speed
If hands are positioned to carry multiple wafers simultaneously, then transfer speed increases, but interference with existing wafers occurs during cassette insertion
Solution Approach 1:
The patent resolves the contradiction between speed and reliability by dynamically adjusting the position of the hands. During wafer insertion operations, the empty hand can be moved to a position that avoids interfering with the cassette or wafers being inserted, ensuring reliable operation. When not inserting, the hands can be positioned to carry multiple wafers simultaneously for high-speed transfer, thus achieving both speed and reliability.
Data Source
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AI summary
The present invention relates to an end effector including: blade members for holding substrates, each configured to hold the substrate, and configured such that each interval between the blade members can be changed; a blade support unit configured to support the blade members, the blade support unit being configured to be driven integrally with the blade members by the robot; and blade drive means configured to change the interval between the blade members by moving at least one of the blade members relative to another blade member.