Adjustable Showerhead Distributor for Uniform Wafer Pre-Clean
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Solution Overview
Problem
In semiconductor manufacturing, maintaining uniformity of gas distribution in vapor phase or plasma processes is challenging, particularly with fixed showerhead configurations, leading to non-uniform pre-clean operations and the need for frequent showerhead replacements.
Innovation Solution
An adjustable showerhead assembly with a distributor assembly comprising a base sheet and control sheets that can adjust opening sizes and positions to control gas flow, allowing for selective adjustment of gas flow amounts and patterns to maintain or improve process uniformity without replacing the showerhead.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a fixed showerhead configuration is used, then the device structure is simple, but the process uniformity deteriorates due to non-uniform gas distribution
Solution Approach 1:
The distributor assembly is segmented into multiple independent control sheets, each with adjustable openings. This allows different regions of the showerhead to be independently adjusted to achieve uniform gas distribution across the substrate, resolving the contradiction between simple structure and process uniformity.
Solution Approach 2:
The control sheets are made adjustable rather than fixed, allowing dynamic modification of opening sizes and positions. This enables the system to adapt to different process requirements and compensate for non-uniformities, improving process uniformity while maintaining reasonable structural complexity.
2Manufacturing precision
If the showerhead is frequently replaced to maintain uniformity, then the process uniformity is maintained, but the downtime and productivity deteriorate
Solution Approach 1:
The adjustable control sheets allow the showerhead to be reconfigured in-situ to maintain uniform gas distribution without replacement. This eliminates downtime associated with showerhead changes while preserving process uniformity, directly addressing the productivity concern.
Solution Approach 2:
By changing the parameters of the control sheets (opening sizes, positions, patterns), the system can maintain optimal gas distribution characteristics without physical replacement of the showerhead assembly, thereby preventing productivity loss.
3Adaptability or versatility
If the opening sizes in the distributor assembly are fixed, then the manufacturing is simple, but the adaptability to different process conditions deteriorates
Solution Approach 1:
The distributor assembly is divided into multiple control sheets that can be manufactured separately with standard opening patterns. This segmentation allows for simpler individual component fabrication while providing overall system adaptability through combinatorial arrangement of the sheets.
Solution Approach 2:
The control sheets are designed with universal adjustability, where each sheet can serve multiple functions by adjusting its position and orientation. This multi-functionality provides adaptability to various process conditions without requiring complex custom manufacturing for each scenario.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances process uniformity and reduces downtime by dynamically adjusting gas flow to compensate for thickness variations, improving the yield and quality of semiconductor devices and reducing maintenance needs.
Implementation Method 1
an overlapping amount of a plurality of control openings (1162) of the plurality of control sheets (1160) and base openings (1132) of the base sheet (1130) is adjusted from 0% to 100%, thereby adjusting an amount of the cleaning material that passes through the adjustable distributor assembly (1100)
Data Source
AI summary
A device for cleaning a wafer in a semiconductor manufacturing apparatus includes a showerhead and an adjustable distributor assembly. The showerhead is disposed over a wafer stage within a cleaning chamber and configured to eject cleaning material through the showerhead towards a cleaning surface of a wafer. The adjustable distributor assembly is disposed within the showerhead through which the cleaning material passes. The adjustable distributor assembly includes a base sheet and a plurality of control sheets. The base sheet includes base openings, and the plurality of control sheets include control openings and are configured to slidably mate with the base sheet to provide selectively adjustable openings.