Aerosol Deposition Vortex Detection and Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing film formation techniques using aerosols often result in non-uniform film thickness due to the generation of vortices in air flows, leading to inconsistent deposition of particles.
Innovation Solution
A processing system that includes a chamber, a supplier, a detector, and a controller, which detects the generation of vortices in the air flow and controls the supply of particles to maintain a steady-state air flow, ensuring uniform film thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the supply amount or flow velocity of the aerosol is increased to improve film formation speed, then productivity is improved, but a vortex is generated in the air flow causing non-uniform film thickness
Solution Approach 1:
The system uses a detector to continuously monitor the air flow state and provides feedback to the controller. When a vortex is detected, the controller adjusts the aerosol supply to eliminate the vortex, ensuring uniform film thickness while maintaining high productivity
Solution Approach 2:
The system dynamically adjusts the aerosol supply amount and flow velocity based on real-time detection of air flow conditions. The controller modifies supply parameters during operation to prevent vortex formation while maintaining optimal film formation speed
2Productivity
If the aerosol concentration is increased to improve deposition rate, then productivity is improved, but vortex generation causes non-uniform particle deposition
Solution Approach 1:
The detector monitors air flow conditions in real-time and provides feedback to the controller. When vortex conditions are detected, the controller adjusts aerosol concentration to maintain uniform particle deposition while preserving high deposition rates
Solution Approach 2:
The system changes aerosol concentration parameters dynamically based on detected air flow conditions. The controller modifies concentration levels to prevent vortex-induced non-uniformity while maintaining optimal deposition performance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves uniform film thickness by interrupting particle deposition when a vortex is detected and restarting when the air flow returns to a steady state, thereby maintaining consistent film formation across the substrate.
Implementation Method 1
The detector is configured to detect a state of air flow in a vicinity of the processing object
Implementation Method 2
supplying a plurality of particles and a gas to the processing object
Implementation Method 3
form a film by generating an aerosol, supplying the generated aerosol toward a processing object, and depositing a plurality of particles included in the aerosol on a surface of the processing object
Data Source
AI summary
According to one embodiment, a processing system includes a chamber, a supplier, a detector, and a controller. The chamber is configured to store a processing object inside. The supplier is configured to supply a plurality of particles and a gas inside the chamber. The detector is configured to detect a state of air flow in a vicinity of the processing object. The controller is configured to control the supplier based on a detection value from the detector. The controller determines generation of a vortex based on data regarding a steady state of the air flow and the detection value from the detector, and controls the supplier to stop supply of the plurality of particles when the generation of the vortex is determined.