AFM and Optical Measurement Synchronization for Shape Data
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Solution Overview
Problem
Optical measurement devices face challenges with long setup times and inaccurate fitting calculations for complex shapes, and existing solutions like CD-SEM lack sufficient accuracy.
Innovation Solution
An atomic force microscope equipped with an optical measurement device that synchronizes scanning and data matching between the AFM and optical measurement systems, allowing for precise shape information acquisition using characteristic values like height, top width, and surface roughness, and utilizing localized surface plasmon resonance for enhanced data integration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If optical measurement device is used for high-speed measurement, then measurement speed is improved, but setup time increases and measurement precision deteriorates for complex shapes
Solution Approach 1:
The measurement process is divided into two stages: first, AFM acquires precise shape information at specific points to extract characteristic values; second, optical measurement device uses these characteristic values as initial parameters for fitting calculations. This segmentation allows each device to perform its optimal function while overcoming individual limitations.
Solution Approach 2:
The AFM performs preliminary measurement to acquire accurate shape information before the optical measurement device conducts its fitting calculation. The characteristic values extracted from AFM data serve as pre-prepared initial parameters, eliminating the need for the optical device to perform time-consuming setup and iterative calculations from scratch.
2Reliability
If optical measurement device performs repetitive measurement, then reproducibility is improved, but setup time increases
Solution Approach 1:
The system performs preliminary AFM measurement to establish accurate characteristic values before repetitive optical measurements. These pre-acquired characteristic values serve as fixed initial parameters for subsequent optical fitting calculations, eliminating repeated setup time while maintaining the reproducibility benefits of optical measurement.
3Adaptability or versatility
If additional measurement device like CD-SEM is used, then measurement coverage is improved, but measurement precision deteriorates
Solution Approach 1:
The system merges the capabilities of AFM (high precision shape measurement) and optical measurement device (high-speed area measurement) into an integrated system. The AFM provides precise characteristic values that guide the optical device, achieving both high precision and high speed without needing CD-SEM which lacks sufficient accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables accurate and rapid shape data acquisition, reduces measurement time, and integrates data seamlessly, improving overall measurement speed and reducing costs by combining AFM and optical measurement device data.
Implementation Method 1
a detection unit configured to detect light reflected by the surface of the measurement target
Implementation Method 2
generating localized surface plasmon resonance by emitting light to a portion between the probe and the surface of the measurement target using the lighting unit of the optical measurement device
Data Source
AI summary
An atomic force microscope equipped with an optical measurement device is disclosed. An atomic force microscope equipped with an optical measurement device which acquires characteristics of a surface of a measurement target by moving a probe along the surface of the measurement target while scanning the measurement target on an XY plane using an XY scanner for supporting the measurement target, includes: an optical measurement device including a lighting unit configured to allow light to enter the surface of the measurement target, and a detection unit configured to detect light reflected by the surface of the measurement target, the optical measurement device being configured to acquire the characteristics of the surface of the measurement target by the scanning by the XY scanner; and a control device configured to control an operation of the atomic force microscope and an operation of the optical measurement device.