AgAu Reflective Contact Layer for Micro-LED Transfer Yield

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Solution Overview

Problem

The self-assembly method for micro-LED displays faces challenges in quickly and accurately transferring millions of semiconductor light emitting devices due to high transfer error rates and lowered yield, with issues in directional control of LED chips and decreased electrical contact characteristics, leading to reduced light efficiency and luminance, especially for red color emission.

Innovation Solution

A semiconductor light emitting device with a reflective contact layer including an AgAu alloy is used, which forms ohmic contact areas randomly distributed on the semiconductor layer, improving light efficiency and assembly accuracy without increasing process complexity or thickness, and ensuring high reflectivity across RGB wavelength bands.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If self-assembly method is used to transfer millions of semiconductor light emitting devices, then transfer speed is improved, but transfer error rate increases and transfer yield decreases

Engineering Contradiction:
Improvetransfer speedVSAvoidtransfer yield
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent applies preliminary action by pre-forming凸起 structures on the semiconductor light emitting device and corresponding recesses on the substrate before the self-assembly transfer process. These pre-formed mechanical interlocking features ensure that when the devices self-assemble, they automatically align and lock into position, preventing transfer errors and improving yield while maintaining high transfer speed

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces凸起 structures as an intermediary mechanical feature that mediates between the semiconductor light emitting device and the substrate. These凸起 structures act as positioning and locking intermediaries that guide the self-assembly process, ensuring accurate placement and reducing transfer errors without compromising transfer speed

Inventive Principle:
Principle #24Intermediary (Mediator)

2Use of energy by moving object

If reflective layer is added to improve light efficiency, then light efficiency improves, but device thickness increases

Engineering Contradiction:
Improvelight efficiencyVSAvoiddevice thickness
Core Design Contradiction:
Use of energy by moving objectVSLength of stationary object

Solution Approach 1:

The patent employs thin film technology by using an extremely thin reflective layer (5-50 nm) deposited on the semiconductor light emitting device. This thin film approach provides sufficient light reflection efficiency while minimizing the increase in device thickness, maintaining the overall compact structure of the display device

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent applies parameter changes by optimizing the thickness and material composition of the reflective layer. By controlling the reflective layer thickness within 5-50 nm and selecting appropriate materials, the patent achieves high light efficiency while keeping the thickness increase minimal, thus resolving the contradiction between light efficiency and device thickness

Inventive Principle:
Principle #35Parameter changes

3Reliability

If AgAu alloy is used for reflective contact layer, then reflectivity improves and oxidation resistance improves, but manufacturing complexity increases

Engineering Contradiction:
Improveoxidation resistanceVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent uses composite materials by combining Ag and Au in a specific alloy ratio (Ag:Au = 9:1 to 1:9) to create the reflective contact layer. This composite material approach provides both high reflectivity and excellent oxidation resistance, while the standardized alloy formulation simplifies the manufacturing process by using a proven material composition rather than requiring complex multi-layer structures

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances light efficiency, assembly rate, and electrical reliability by preventing metal oxidation and peeling during self-assembly, while maintaining a thin structure and low process difficulty, achieving high reflectivity for each RGB color band.

Implementation Method 1

a reflective contact layer disposed below the light emitting structure. Also, the reflective contact layer can include a first reflective layer including an AgAu alloy

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 2

a self-assembly type transfer process using dielectrophoresis (DEP) has been attempted

Methodology Applied
Scientific EffectDielectrophoresis: Dielectric

Implementation Method 3

firstly moving the LED chip to the assembly hole area by magnetic force of the magnet

Methodology Applied
Scientific EffectMagnetic force: Magnetic Field

Data Source

PatentUS20240395977A1Semiconductor light emitting device for pixel and method for manufacturing the same
Publication Date: 2024.11.28 LG ELECTRONICS INC
  • US20240395977A1 patent drawing
  • US20240395977A1 patent drawing
  • US20240395977A1 patent drawing

AI summary

A semiconductor light emitting device including a light emitting structure and a reflective contact layer disposed below the light emitting structure. Further, the reflective contact layer includes a plurality of ohmic contact areas contacting a first conductivity-type semiconductor layer of the light emitting structure in which a first ohmic contact area has a different size than a second ohmic contact area included in the plurality of ohmic contact areas; and a first reflective layer comprising an AgAu alloy and covering the plurality of ohmic contact areas.