Air Blower Control for Particle Removal in Electronic Device Manufacturing

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Solution Overview

Problem

In microelectronic component manufacturing, contaminants such as particles can be introduced during the process, leading to issues like malfunction or rejection of components, which affects yield.

Innovation Solution

An apparatus and method utilizing integrated air blowers to remove contaminants from microelectronic components during manufacturing. The apparatus includes a mechanized member to move components along a lane, an air blower with an air flow path intersecting the lane, and processors to activate the air blower based on conditions met, such as the presence of components detected by an optical detector.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If air blowers are continuously activated to remove contaminants, then manufacturing yield improves, but energy consumption increases

Engineering Contradiction:

Improvemanufacturing yieldVSAvoidenergy consumption

Core Design Contradiction:

ReliabilityVSUse of energy by moving object

Solution Approach 1:

The air blower is activated periodically based on sensor detection rather than continuously. The control system activates the air blower only when particles are detected by optical sensors or cameras, creating an on-demand periodic operation mode that reduces energy consumption while maintaining effective contaminant removal when needed.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The system employs optical sensors and cameras to detect particles in real-time, providing feedback to the control system. This feedback mechanism enables intelligent activation of the air blower only when contamination is detected, optimizing the balance between manufacturing yield improvement and energy consumption reduction.

Inventive Principle:

Principle #23Feedback

2Manufacturing precision

If air blowers are activated early in the process to prevent contamination, then product quality improves, but process time increases

Engineering Contradiction:

Improveproduct qualityVSAvoidprocess time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The air blower is positioned to activate before components enter critical processing zones, providing preliminary cleaning action. The system detects particles upstream and activates the air blower in advance to remove contaminants before they can cause damage, ensuring product quality without adding significant process time.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The air blower provides rapid, focused cleaning action that quickly removes particles rather than using prolonged low-intensity cleaning. This rushing through approach eliminates contaminants efficiently in a short time window, maintaining product quality while minimizing process time extension.

Inventive Principle:

Principle #21Skipping (Rushing through)

3Measurement precision

If multiple sensors are deployed to detect particles, then contaminant detection accuracy improves, but device complexity increases

Engineering Contradiction:

Improvecontaminant detection accuracyVSAvoiddevice complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The system combines multiple sensing modalities (optical sensors, cameras) into an integrated detection system. The control system processes signals from multiple sensors and coordinates air blower activation based on combined information, achieving high detection accuracy while managing complexity through unified control logic.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The optical sensors and cameras serve multiple functions: detecting particles of various sizes, determining particle location, and triggering appropriate cleaning responses. This multi-functionality approach improves detection accuracy without proportionally increasing device complexity, as the same sensing infrastructure serves multiple detection purposes.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces or removes contaminants from microelectronic components, improving manufacturing yield by ensuring cleaner components and preventing issues like sagging or damaged wire bonds.

Implementation Method 1

activating the air blower to cause air to blow along the air flow path onto the one or more electronic devices

Methodology Applied

Scientific EffectAir flow:

Implementation Method 2

an optical detector arranged with respect to the lane such that the one or more electronic devices intersect an optical path detected by the optical detector

Methodology Applied

Scientific EffectOptical detection:

Data Source

PatentUS20250187045A1Systems and methods for reducing particle contamination in an electronic device manufacturing process

Publication Date: 2025.06.12 SKYWORKS SOLUTIONS INC

AI summary

An apparatus configured to process electronic devices during manufacture, the apparatus. The apparatus can include a mechanized member configured to actuate to move one or more electronic devices along a lane, and an air blower supported with respect to the lane such that an air flow path of the air blower intersects the lane. One or more processors can be configured to determine that a first condition has been met for activating the air blower. In response to the first condition being met, the air blower activates to blow air along the air flow path and onto the one or more electronic devices.