External reference air sensor compares internal detection results to calibrate mounting head maintenance device sensors.
A placement apparatus uses a radial purge gas flow path between the substrate and stage to prevent film formation on non-target surfaces.
Suction extracts contaminants from the skid aperture and stylus gap, preventing measurement accuracy decline caused by adhering coolants.
Segmented cassette sections connect via labyrinth seals to bypass transport size limits while resisting corrosion from concrete filling.
A portable cleaning device uses pressurized air jets to rotate inside filter apertures for effective particulate removal.
Convex blow box surfaces shed dust via gravity and Coanda airflow, preventing accumulation that degrades underpressure adhesion reliability.
A surface cleaning device monitors process gas concentration in feed and exhaust streams to evaluate cleaning progress.
Automated electronic device removes foreign objects from a device under test using position data and a ring structure removal element.
Cam plate notches rotate the nozzle start position between cycles, distributing condensate erosion over internal surfaces.