Air Grid Structure for Image Sensor Crosstalk and Stability
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Solution Overview
Problem
Existing image sensors face challenges with optical crosstalk and structural stability, particularly due to the lack of effective isolation between adjacent pixels, which affects imaging performance and can lead to noise and structural integrity issues.
Innovation Solution
The implementation of an air grid structure with physically isolated air layers over the substrate and between color filters, which reduces optical crosstalk and enhances structural stability by dispersing pressure across multiple regions, thereby preventing collapse or popping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a continuous air grid structure is used to isolate adjacent pixels, then optical crosstalk is reduced, but structural stability decreases due to pressure-related collapse or popping
Solution Approach 1:
The air grid structure is divided into multiple discrete air layers stacked vertically, with each layer physically isolated from adjacent layers by support structures. This segmentation allows the structure to maintain optical isolation effectiveness while distributing mechanical stress across multiple independent layers, preventing collapse or popping that would occur in a continuous structure
Solution Approach 2:
Multiple air layers are stacked vertically within the same horizontal footprint, creating a nested configuration where each air layer is contained within the overall grid structure. This nesting approach maintains effective optical isolation while the vertical stacking allows pressure to be distributed across multiple levels rather than concentrating stress in a single continuous layer
2Reliability
If the air grid structure is made more robust to prevent collapse, then structural stability improves, but optical crosstalk isolation effectiveness decreases
Solution Approach 1:
The support structures are strategically positioned only at critical locations where mechanical support is needed, rather than creating a continuous robust structure. This localized support approach provides sufficient structural stability to prevent collapse while maintaining the open areas necessary for effective optical isolation between pixels
Data Source
AI summary
An image sensing device is disclosed. The image sensor includes a stacked air grid including a plurality of air layers that is physically isolated from each other and then stacked, and a color filter disposed at one side of the stacked air grid.