Air Grid Structure for Image Sensor Crosstalk Reduction
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Solution Overview
Problem
Existing image sensing devices face challenges in preventing optical crosstalk between color filters, which can lead to reduced image quality and light loss.
Innovation Solution
An image sensing device with an air grid structure is designed, featuring a substrate with photoelectric conversion elements, an air layer, a support film, and a capping film to spatially isolate sensing regions and minimize optical interference between color filters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a grid structure is introduced to prevent optical crosstalk between color filters, then image quality is improved, but device complexity and manufacturing difficulty increase
Solution Approach 1:
The grid structure divides the color filter array into separate sensing regions, physically segmenting the optical paths between adjacent color filters. This segmentation prevents optical crosstalk by creating isolated zones for each color filter, thereby improving image quality while managing the complexity through systematic division rather than complex shielding mechanisms
Solution Approach 2:
The grid structure acts as an intermediary element positioned between adjacent color filters. This intermediate structure blocks stray light and prevents optical interference from one color filter affecting adjacent filters, resolving the crosstalk issue without requiring modification to the color filters themselves
2Object-affected harmful factors
If a grid structure is introduced to prevent optical crosstalk, then optical interference is reduced, but light loss increases
Solution Approach 1:
The grid structure is strategically positioned only at the boundaries between color filter regions where optical crosstalk occurs, rather than covering the entire sensor surface. This localized approach provides optical isolation precisely where needed while leaving the majority of the light path unobstructed, thereby minimizing light loss while effectively reducing optical interference
Solution Approach 2:
The grid structure provides partial isolation between color filters rather than complete blocking. By implementing just enough structural separation to prevent crosstalk without excessive material placement, the solution achieves the necessary optical interference reduction while maintaining maximum light transmission to the photoelectric conversion elements
Data Source
AI summary
An image sensing device and a method for forming the same are disclosed. The image sensing device includes a substrate including one or more photoelectric conversion elements, and a grid structure disposed over the substrate. The grid structure includes an air layer, a support film formed over the air layer, and a capping film formed at side surfaces of the air layer and the support film and at a top surface of the support film.