Air-Layer Heating Unit for Uniform Substrate Bake Temperature
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Solution Overview
Problem
In semiconductor manufacturing, the photolithography process faces inefficiencies due to heat loss through the upper and side surfaces of bake chambers, leading to non-uniform internal temperatures and degraded substrate treatment performance.
Innovation Solution
A heating unit with air layers for thermal insulation is integrated into the substrate treating apparatus, comprising a first air layer above the heating plate and a second air layer on the sides, which minimizes fluid flow and enhances temperature uniformity by forming air purge and exhaust spaces within the chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a conventional bake chamber is used for substrate heat treatment, then the substrate can be heated, but a large amount of heat is lost through upper and side surfaces leading to non-uniform internal temperature
Solution Approach 1:
The patent introduces air layers as intermediary thermal insulation structures between the heating chamber and the external environment. These air layers act as mediators that reduce direct heat transfer through the chamber walls, thereby minimizing heat loss and improving temperature uniformity without requiring fundamental changes to the chamber structure
Solution Approach 2:
The heating unit employs a composite structure combining solid heating elements with gaseous air layers. This composite design leverages the insulating properties of trapped air alongside the thermal conduction capabilities of the heating elements, creating a hybrid system that simultaneously achieves efficient heating and effective thermal insulation
2Loss of energy
If the chamber structure is modified to improve insulation, then heat loss may be reduced, but the existing chamber structure must be maintained
Solution Approach 1:
The heating unit is segmented into distinct functional layers: a heating element layer, intermediate air insulation layers, and a substrate treatment chamber. This segmentation allows the insulation function to be added as a separate module without redesigning the entire chamber structure, thereby reducing heat loss while maintaining the original chamber configuration
Solution Approach 2:
The air layers are pre-configured within the heating unit structure before the substrate treatment process begins. This preliminary arrangement of insulation layers ensures that thermal insulation is already in place when heating commences, eliminating the need for structural modifications to the chamber during operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The air layer insulation improves temperature uniformity by about 30% and reduces heat capacity, accelerating the temperature increase rate while maintaining the existing chamber structure.
Implementation Method 1
a first air layer provided inside the body for thermal insulation and formed in a first direction as a longitudinal direction of the heating unit; and a second air layer provided inside the body for thermal insulation and formed in a second direction as a longitudinal direction of the heating unit
Data Source
AI summary
Provided are a heating unit including an air layer for thermal insulation and a substrate treating apparatus including the heating unit. The substrate treating apparatus includes: a housing providing a space in which a substrate is treated; a heating unit disposed in the housing and heating the substrate; a cooling unit disposed in the housing and cooling the substrate; and a transfer unit for moving the substrate, wherein the heating unit includes: a body including a heater therein; a first air layer provided inside the body for thermal insulation and formed in a first direction as a longitudinal direction thereof; and a second air layer provided inside the body for thermal insulation and formed in a second direction as a longitudinal direction thereof.