Air Scattering Standard for Optical Instrument Calibration

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Solution Overview

Problem

Current optical scattering standards, such as Spectralon tiles and silicon wafer standards, introduce contamination risks, require additional alignment steps, increase costs, and degrade over time due to electromagnetic radiation and environmental exposure, making them inadequate for reliable system calibration and alignment.

Innovation Solution

An inspection system utilizing an air scattering standard, which includes illumination sources, optics to focus and collect scattered light, and a detector with a controller to compare the scattered light intensity and polarization to a predetermined standard, allowing for real-time monitoring and adjustment of the beam's state without the need for a physical insertable object.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If physical scattering standards (Spectralon tiles, silicon wafers) are used, then calibration can be performed, but contamination is introduced and the standards degrade over time

Engineering Contradiction:
Improvecalibration reliabilityVSAvoidcontamination
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent uses air molecules as an intermediary medium to perform scattering-based calibration. Instead of introducing physical standards that contaminate the optical path, the system utilizes the naturally present air molecules to scatter light, providing a contamination-free calibration reference. The air acts as a mediator between the light source and detector, enabling calibration without physical inserts.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system uses the ambient air already present in the chamber as the scattering medium, eliminating the need for external calibration standards. The air itself provides the scattering effect needed for calibration, and the system can perform self-calibration by referencing the known scattering properties of air at standard conditions.

Inventive Principle:
Principle #25Self-service

2Reliability

If physical scattering standards are used, then calibration is possible, but additional alignment steps are required

Engineering Contradiction:
Improvecalibration capabilityVSAvoidalignment steps
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts the calibration function from physical standards and transfers it to the air medium itself. By removing the need for insertable calibration tiles or wafers, the system eliminates the alignment steps required to position these physical standards. The calibration capability is taken out of the mechanical domain and embedded in the optical properties of air.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The air in the chamber serves multiple functions: it is both the medium being inspected (in some applications) and the calibration standard. This multi-functionality eliminates the need for separate calibration standards and their associated alignment procedures, as the same air volume provides both inspection and calibration functions.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If physical scattering standards are used, then calibration reference is available, but cost increases

Engineering Contradiction:
Improvecalibration referenceVSAvoidsystem cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces expensive, durable calibration standards (Spectralon tiles, precision silicon wafers) with cheap, readily available air. While air is not consumable in the traditional sense, the principle of using a low-cost, ubiquitous medium replaces high-cost specialized materials. The scattering reference is derived from something that costs essentially nothing compared to precision optical standards.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The system calibrates by referencing the known scattering cross-section of air molecules at standard temperature and pressure conditions. By using well-established physical constants for air scattering rather than expensive physical standards, the system achieves calibration reference capability without the associated costs of manufacturing, maintaining, and replacing physical standards.

Inventive Principle:
Principle #35Parameter changes

4Reliability

If physical scattering standards are used, then initial calibration is possible, but they degrade over time due to electromagnetic radiation and environment

Engineering Contradiction:
Improvecalibration stabilityVSAvoidstandard lifespan
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The system uses ambient air as the calibration medium, which naturally replenishes itself and does not degrade. Unlike physical standards that accumulate damage from radiation and environmental exposure, air molecules are continuously supplied by the environment and maintain their scattering properties indefinitely, providing long-term calibration stability without replacement.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent utilizes the inherent stability of air (an inert mixture of gases) as the calibration medium. Air is resistant to degradation from electromagnetic radiation and environmental factors that affect organic materials like Spectralon. The inert nature of atmospheric gases provides a stable, non-degrading scattering reference that maintains its calibration properties over extended periods.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution provides a contamination-free, cost-effective, and stable method for optical system calibration and alignment, improving system monitoring and calibration by using air scattering as a standard, eliminating the need for physical inserts and reducing degradation issues.

Implementation Method 1

one or more illumination sources configured to generate a beam of illumination; one or more illumination optics configured to focus the beam of illumination into a volume of air; one or more collection optics configured to collect a portion of illumination scattered from the volume of air

Methodology Applied
Scientific EffectLight scattering: Scattering

Implementation Method 2

a detector configured to receive the collected portion of illumination from the one or more collection optics; the set of program instructions are configured to cause the one or more processors to receive one or more signals from the detector indicative of an intensity of the illumination scattered from the volume of air

Methodology Applied
Scientific EffectLight detection:

Data Source

PatentUS11016024B2Air scattering standard for light scattering based optical instruments and tools
Publication Date: 2021.05.25 KLA CORP
  • US11016024B2 patent drawing
  • US11016024B2 patent drawing
  • US11016024B2 patent drawing

AI summary

An inspection system utilizing an air scatter standard includes one or more illumination sources to generate a beam of illumination, illumination optics configured to focus the beam of illumination into a volume of air contained within a chamber of an inspection chamber, one or more collection optics configured to collect a portion of illumination scattered from the volume of air, a detector configured to receive the collected portion of illumination from the one or more collection optics, a controller including one or more processors, communicatively coupled to the detector, configured to execute a set of program instructions to receive one or more signals from the detector and determine a state of the beam of illumination at one or more times based on a comparison between at least one of the intensity or polarization of the illumination scattered from the volume of air and a predetermine air scatter standard.