Alternating Substrate Heater Layout to Eliminate Cold Zones
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Solution Overview
Problem
Existing substrate heating devices for large-area substrates suffer from non-heat generation areas due to connection terminals, leading to non-uniform heating and increased process time.
Innovation Solution
A substrate heating device with alternating heaters and non-overlapping connection terminals, combined with an insulating cover and reflection plate, to minimize non-heat generation areas and enhance heating efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If linear heaters are disposed for multiple sections in one direction, then the substrate can be heated across large areas, but non-heat generation areas are generated between adjacent sections due to connection terminals
Solution Approach 1:
The patent transitions from linear arrangement of heaters in one direction to a two-dimensional grid pattern where heaters are arranged in multiple directions (first direction and second direction perpendicular to the first). This dimensional change allows heat generation areas to overlap and eliminates non-heat generation gaps between sections, achieving uniform heating across the entire substrate area.
Solution Approach 2:
The patent combines multiple heater sections in a grid pattern where the heat generation areas of adjacent heaters overlap. By merging the heating zones through this spatial arrangement, the non-heat generation areas that would normally exist between linear sections are eliminated, creating a continuous and uniform heating field across the substrate.
2Reliability
If connection terminals are provided on ends of linear heaters, then electrical connection is achieved, but non-heat generation areas are inevitably generated between adjacent sections
Solution Approach 1:
The patent arranges heaters in a two-dimensional grid pattern with connection terminals positioned at ends extending in different directions. This spatial reconfiguration allows electrical connections to be made while the heat generation bodies overlap in the perpendicular direction, eliminating non-heat generation areas without compromising electrical connection reliability.
3Temperature
If preheating is performed in a preheating chamber or loadlock chamber, then large-area substrates can be heated, but additional process time is required
Solution Approach 1:
The patent enables continuous and uniform heating across the entire substrate surface through the grid pattern heater arrangement. This eliminates the need for staged heating processes or preheating chambers by providing simultaneous uniform heating throughout the substrate area, thereby reducing total process time while achieving the required substrate temperature.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Uniform substrate heating is achieved by minimizing non-heat generation areas, reducing process time, and improving heating efficiency through concentrated heat distribution.
Implementation Method 1
a plurality of heaters which is provided below the substrate support part and each of which includes a connection terminal provided on an end of each of the plurality of heaters and a heat generation body extending from the connection terminal in one direction
Implementation Method 2
a reflection plate provided below the plurality of heaters
Data Source
AI summary
Provided are a substrate heating device and an apparatus for processing a substrate having the same, and more particularly, to a substrate heating device that heats a substrate and an apparatus for processing a substrate having the same. The substrate heating device includes a substrate support part configured to seat a substrate thereon and a plurality of heaters which is provided below the substrate support part and each of which includes a connection terminal provided on an end of each of the plurality of heaters and a heat generation body extending from the connection terminal in one direction. The plurality of heaters are disposed alternatively so that partial areas comprising the ends overlap each other in a direction crossing the one direction.