Amine-Heterocyclic Leveling Agent for Uniform Copper Plating

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Solution Overview

Problem

Current electroplating bath additives fail to provide uniform copper deposits on substrates with irregular topography, particularly in areas with both through-holes and blind vias, leading to challenges in achieving level copper layers and sufficient throwing power in PCB manufacturing.

Innovation Solution

A reaction product of amine monomers and polymers containing saturated heterocyclic moieties is introduced into the electroplating bath, which acts as a leveling agent to ensure uniform metal deposition across substrates with varying features, enhancing the throwing power of the bath.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional leveling agents are used in electroplating baths, then copper deposition occurs on substrate surfaces, but uniform metal deposit cannot be achieved on substrates with irregular topography and mixed aperture types

Engineering Contradiction:
Improveuniformity of copper depositVSAvoidperformance across varied aperture geometries
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent modifies the chemical parameters of the leveling agent by reacting amine monomers with polymers containing saturated heterocyclic moieties to create a derivative compound with altered electrochemical properties. This chemical transformation enables the leveling agent to effectively interact with both through-holes and blind vias, achieving uniform copper deposition across diverse aperture geometries that conventional agents cannot handle

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention creates a composite chemical structure by combining amine monomer components with polymer backbones containing saturated heterocyclic moieties. This composite molecule integrates the benefits of both components: the amine group provides leveling functionality while the heterocyclic polymer structure enhances adaptability to different aperture types, resulting in a leveling agent that performs uniformly across mixed via geometries

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If electroplating is performed on substrates with narrow and tall apertures, then copper can be deposited in through-holes, but voltage drop causes uneven deposit thickness between surface and aperture interiors

Engineering Contradiction:
Improvedeposit thickness uniformityVSAvoidvoltage drop in apertures
Core Design Contradiction:
Manufacturing precisionVSStress or pressure

Solution Approach 1:

The patent alters the electrochemical parameters of the plating system by introducing a leveling agent with modified molecular structure (amine monomer reaction product with heterocyclic polymer). This chemical modification changes the deposition kinetics and voltage distribution characteristics, enabling uniform copper thickness in narrow and tall apertures despite inherent voltage drop effects that plague conventional plating processes

Inventive Principle:
Principle #35Parameter changes

3Productivity

If sequential build up technologies with blind vias are used to maximize via filling, then high density interconnects are achieved, but thickness variation in copper deposit between vias and substrate surface increases

Engineering Contradiction:
Improvevia filling efficiencyVSAvoidcopper deposit thickness consistency
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The invention modifies the chemical parameters of the electroplating bath by incorporating a leveling agent derived from amine monomer-polymer reactions. This chemical change optimizes the deposition profile to achieve both high via filling and uniform copper thickness across the substrate surface, resolving the trade-off between productivity and precision in sequential build up processes

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively provides substantially level metal deposits on substrates with small features and varied aperture sizes, improving the throwing power and reliability of copper plating, even in complex geometries like blind vias and through-holes, with minimal cracking and optimal physical reliability under thermal stress.

Implementation Method 1

Methods for electroplating articles with metal coatings generally involve passing a current between two electrodes in a plating solution where one of the electrodes is the article to be plated

Methodology Applied
Scientific EffectElectroplating: Electroplating

Data Source

PatentUS11732374B2Reaction products of amine monomers and polymers containing saturated heterocyclic moieties as additives for electroplating baths
Publication Date: 2023.08.22 DDP SPECIALTY ELECTRONICS MATERIALS US LLC
  • US11732374B2 patent drawing
  • US11732374B2 patent drawing
  • US11732374B2 patent drawing

AI summary

Reaction products of amines and polymers containing saturated heterocyclic moieties may be used as levelers in metal electroplating baths. The reaction products may plate metal with good surface properties and good physical reliability.