Top-Emitting AMOLED Bonding Pad Protection Against Etching
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Solution Overview
Problem
Conventional top emitting AMOLED panels experience poor electrical signal transmission due to issues like acid penetration during etching and silver oxidation, which affect the bonding pad and metal layers.
Innovation Solution
A top emitting AMOLED display panel is designed with a passivation layer sandwiched between an interlayer insulating layer and a planarization layer, and a protective conductive layer that covers the metal layer and its side walls, preventing oxidation and etching during subsequent processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If ITO is used as bonding pad in top emitting AMOLED panel, then bonding pad can be formed, but acid liquor penetrates into ITO and etches metal layer below causing bonding pad abnormality
Solution Approach 1:
The patent introduces a protective conductive layer as an intermediary between the ITO bonding pad and the metal layer below. This intermediate layer prevents acid liquor from penetrating into the ITO and etching the underlying metal layer, thereby maintaining bonding pad reliability while preserving the ease of manufacturing with ITO bonding pads.
Solution Approach 2:
The protective conductive layer is formed in advance before the ITO bonding pad is deposited. This preliminary action creates a protective barrier that prevents subsequent acid penetration and etching issues, allowing the ITO bonding pad to be formed without the harmful effects that would otherwise occur.
2Reliability
If composite layer with metallic silver is used as bonding pad, then conductivity is improved, but silver oxidation occurs during RA testing
Solution Approach 1:
The protective conductive layer serves as an intermediary protective barrier between the metallic silver bonding pad and the oxidizing environment during RA testing. This intermediate layer prevents direct exposure of silver to oxidizing agents, thereby maintaining the electrical conductivity benefits of silver while preventing silver oxidation.
3Reliability
If copper is used for metal wirings, then conductivity is good, but copper oxidation occurs during metal layer etching process
Solution Approach 1:
The protective conductive layer is formed in advance before the metal layer etching process. This preliminary protective layer prevents copper oxidation during the etching process by acting as a barrier between the copper metal wiring and the oxidizing environment, thereby preserving the electrical conductivity of the copper wirings.
4Ease of manufacture
If conventional structure is used, then manufacturing is simple, but electrical signal transmission is poor
Solution Approach 1:
The protective conductive layer acts as an intermediary that improves electrical signal transmission by preventing oxidation and etching of the underlying metal layers. This intermediate protective layer maintains the integrity and conductivity of the electrical signal transmission paths while adding minimal manufacturing complexity.
Data Source
AI summary
The present disclosure relates to a top emitting AMOLED display panel, a manufacturing method thereof, and a display device. The top emitting AMOLED display panel includes a passivation layer and a protective conductive layer. The passivation layer is sandwiched between an interlayer insulating layer and a planarization layer of the top emitting AMOLED display panel; the protective conductive layer covers a metal layer and side walls of openings. The passivation layer covering the metal layer can physically protect and prevent the metal layer from oxidation, and the protective conductive layer coats the metal layer to prevent the metal layer from being etched or oxidized by anode etching solution.