Amorphous Oxide Electrode Stress Reduction in Imaging Elements

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Solution Overview

Problem

Existing imaging elements with crystalline ITO transparent electrodes suffer from internal stress, leading to stress damage and complex formation processes, which complicates the formation of stress buffer layers and affects the characteristics of the imaging elements.

Innovation Solution

A laminated structure with a first electrode, a light-receiving layer, and a second electrode made of transparent amorphous oxide, which reduces internal stress and eliminates the need for a complex stress buffer layer, ensuring reliable light transmission and improved sealing properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a crystalline ITO transparent electrode is used, then good light transmission is achieved, but internal stress increases causing stress damage to the light-receiving layer

Engineering Contradiction:
Improvelight transmissionVSAvoidstress damage
Core Design Contradiction:
Illumination intensityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the structural parameter of the transparent electrode from crystalline to amorphous state. This parameter change reduces the internal stress while maintaining transparency, thereby preventing stress damage to the light-receiving layer without sacrificing light transmission performance

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a composite structure consisting of an amorphous transparent electrode layer combined with a stress buffer layer. This composite material approach allows the amorphous electrode to provide stress relief while the buffer layer further mitigates any remaining stress, effectively preventing stress damage while maintaining optical properties

Inventive Principle:
Principle #40Composite materials

2Object-affected harmful factors

If a stress buffer layer with laminated structure is added, then stress damage is reduced, but the formation process becomes complex and time-consuming

Engineering Contradiction:
Improvestress damageVSAvoidstructure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent changes the electrode material state from crystalline to amorphous, which inherently reduces internal stress. This parameter change eliminates the need for complex multi-layer stress buffer structures, simplifying the overall device structure while still preventing stress damage to the light-receiving layer

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent extracts the stress relief function from a separate complex stress buffer layer and integrates it into the amorphous transparent electrode itself. By taking out the need for separate stress buffer layers, the invention simplifies the structure while maintaining stress damage prevention

Inventive Principle:
Principle #2Taking out (Extraction)

3Object-affected harmful factors

If a stress buffer layer with laminated structure is added, then stress damage is reduced, but formation time increases

Engineering Contradiction:
Improvestress damageVSAvoidformation time
Core Design Contradiction:
Object-affected harmful factorsVSLoss of time

Solution Approach 1:

The patent changes the electrode from crystalline to amorphous state, which reduces internal stress inherently. This eliminates the need for time-consuming formation of multiple stress buffer layers, thereby reducing overall formation time while still preventing stress damage

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent removes the need for separate stress buffer layer formation processes by incorporating stress relief properties directly into the amorphous transparent electrode. This extraction of the stress buffer function reduces the total number of formation steps and decreases overall formation time

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of transparent amorphous oxide electrodes in imaging elements reduces stress damage, enhances light current characteristics, and improves sensitivity uniformity, while maintaining a simple structure and efficient formation process.

Implementation Method 1

a light-receiving layer (a photoelectric conversion layer)... a transparent electrode to which light enters

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Implementation Method 2

the second electrode is made of a transparent amorphous oxide having a conductive property... internal stress at the second electrode decreases

Methodology Applied
Scientific EffectStress reduction through amorphous structure:

Data Source

PatentUS9905837B2Imaging element, solid-state imaging device, and electronic device
Publication Date: 2018.02.27 SONY GROUP CORP
  • US9905837B2 patent drawing
  • US9905837B2 patent drawing
  • US9905837B2 patent drawing

AI summary

An imaging element has a laminated structure including a first electrode, a light-receiving layer formed on the first electrode, and a second electrode formed on the light-receiving layer. The second electrode is made of a transparent amorphous oxide having a conductive property.