Amorphous Oxide Interlayer with Glass-Forming Agents for Magnetic Junctions

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Solution Overview

Problem

Current magnetic junctions in magnetic memories, such as STT-MRAMs, face limitations in performance due to crystalline structures and interdiffusion issues, which affect tunneling magnetoresistance and stability.

Innovation Solution

Incorporating a thin, amorphous oxide interlayer with glass-forming agents like Si, Be, B, Al, or Ga into the magnetic junctions to create a stable, smooth, and continuous interface between layers, reducing interdiffusion and lattice mismatch, and enhancing the magnetic properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a crystalline oxide interlayer is used in magnetic junctions, then the structural stability is maintained, but interdiffusion occurs between layers causing performance degradation

Engineering Contradiction:
ImprovestabilityVSAvoidinterdiffusion
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the structural parameter of the oxide interlayer from crystalline to amorphous by incorporating glass-forming agents (Si, B, Al, Ga, or Be) at concentrations of 1-50 atomic percent. This parameter change eliminates the crystalline structure that enables interdiffusion, while the amorphous structure maintained stability and prevented harmful interactions between magnetic layers.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite oxide interlayer combining traditional oxide materials with glass-forming agents. This composite structure leverages the glass-forming properties to produce an amorphous phase that acts as a diffusion barrier while maintaining structural integrity and electrical properties necessary for magnetic junction performance.

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If a crystalline oxide interlayer is used, then manufacturing simplicity is maintained, but tunneling magnetoresistance is reduced due to lattice mismatch

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidtunneling magnetoresistance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent modifies the structural parameter from crystalline to amorphous by adding glass-forming agents. This change reduces lattice mismatch with adjacent magnetic layers, thereby improving tunneling magnetoresistance ratio (TMRR) while the deposition process remains straightforward using standard PVD or sputtering techniques.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If glass-forming agents are added to the oxide interlayer, then interdiffusion is reduced and tunneling magnetoresistance is improved, but the complexity of material composition increases

Engineering Contradiction:
Improvetunneling magnetoresistanceVSAvoidmaterial composition complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent optimizes the concentration parameter of glass-forming agents within a specific range (1-50 atomic percent). This parameter optimization achieves the desired amorphous structure and improved tunneling magnetoresistance while avoiding excessive compositional complexity. The selected concentration range ensures effective glass formation without requiring multiple additional elements.

Inventive Principle:
Principle #35Parameter changes

4Reliability

If the oxide interlayer is made amorphous with glass-forming agents, then magnetic damping is reduced, but the precision of controlling layer properties becomes more difficult

Engineering Contradiction:
Improvemagnetic dampingVSAvoidlayer property control
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent controls the amorphous structure formation by precisely adjusting the concentration of glass-forming agents and deposition parameters. This parameter control achieves reduced magnetic damping through amorphous structure while maintaining manufacturable precision through standard deposition process control within the specified concentration ranges.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of glass-forming agents in the oxide interlayer improves the stability and electrical properties of magnetic junctions, leading to increased tunneling magnetoresistance and reduced magnetic damping, thereby enhancing the overall performance of magnetic memories.

Implementation Method 1

Incorporating a thin, amorphous oxide interlayer with glass-forming agents like Si, Be, B, Al, or Ga into the magnetic junctions to create a stable, smooth, and continuous interface between layers

Methodology Applied
Scientific EffectGlass formation: Vitrification

Implementation Method 2

A bottom contact below the MTJ and a top contact on the MTJ are used to drive current through the MTJ in a current-perpendicular-to-plane (CPP) direction in an STT-MRAM. When a sufficient current is driven in one direction perpendicular-to-plane (e.g. top to bottom), the free layer magnetic moment switches to be parallel to that of the reference layer.

Methodology Applied
Scientific EffectSpin transfer torque:

Implementation Method 3

Incorporating a thin, amorphous oxide interlayer with glass-forming agents like Si, Be, B, Al, or Ga into the magnetic junctions to create a stable, smooth, and continuous interface between layers, reducing interdiffusion and lattice mismatch

Methodology Applied
Scientific EffectLattice matching:

Data Source

PatentEP3826014B1Magnetic junction comprising an oxide interlayer containing glass-forming agent
Publication Date: 2023.07.19 SAMSUNG ELECTRONICS CO LTD
  • EP3826014B1 patent drawingFigure 1
  • EP3826014B1 patent drawingFigure 2
  • EP3826014B1 patent drawingFigure 3

AI summary

A magnetic junction usable in a magnetic device is described. The magnetic junction includes a free layer and an oxide interlayer on the free layer. The oxide interlayer includes at least one glass-forming agent. In some aspects, the magnetic junction includes a reference layer and a nonmagnetic spacer layer being between the reference layer and the free layer. The free layer is between the nonmagnetic spacer layer and the oxide interlayer.