AMR Docking Coupler Design for Loading Module Misalignment
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Solution Overview
Problem
Existing autonomous mobile robots (AMRs) in semiconductor manufacturing equipment are not compatible with various loading modules, leading to docking failures due to stop position errors between the male and female couplers, which are essential for power supply and communication.
Innovation Solution
The AMR design includes a male coupler rotatably supported by an elastic member, allowing it to flexibly insert into a female coupler despite position errors, and a docking plate with guide bumps for precise alignment, enabling compatibility with multiple loading modules and minimizing docking failures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a rigid coupler is used for docking between autonomous mobile module and loading module, then structural strength is improved, but docking reliability deteriorates due to stop position errors
Solution Approach 1:
The patent changes the physical state of the coupler from rigid to flexible by introducing an elastic member. This allows the coupler to deform and adapt to position errors during docking, thereby maintaining both structural strength and docking reliability. The elastic member enables the coupler to flexibly adjust its position while still providing sufficient structural support.
2Adaptability or versatility
If multiple autonomous mobile modules are used to support different loading modules, then adaptability is improved, but device complexity increases
Solution Approach 1:
The patent implements a universal docking interface design where the autonomous mobile module is equipped with a standardized coupler that can dock with various types of loading modules. This universal interface allows a single autonomous mobile module to support multiple different loading modules, eliminating the need for multiple specialized modules and thereby reducing system complexity while maintaining high adaptability.
3Manufacturing precision
If precise stop position control is implemented, then docking precision is improved, but system complexity and cost increase
Solution Approach 1:
The patent incorporates an elastic member in the coupler that acts as a cushioning mechanism before docking occurs. This elastic component absorbs and compensates for position errors that occur during the docking process, eliminating the need for highly precise stop position control. The cushioning effect allows docking to succeed even with moderate position variations, thereby reducing control system complexity and cost.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows a single autonomous mobile module to be compatible with multiple loading modules, reducing the risk of docking failures and optimizing battery use by ensuring efficient power supply and communication, thereby enhancing operational efficiency and cost-effectiveness in semiconductor manufacturing processes.
Implementation Method 1
a male coupler rotatably protruding from a docking surface of the autonomous mobile module so as to be inserted into a female coupler of the loading module is flexibly supported by a first elastic member
Data Source
AI summary
Provided is an autonomous mobile robot (AMR) and semiconductor manufacturing equipment including the same, the AMR including an autonomous mobile module capable of autonomously moving along a certain autonomous motion path between a plurality of semiconductor manufacturing apparatuses disposed in semiconductor manufacturing equipment for manufacturing semiconductor devices, to supply materials to or perform maintenance on any one of the plurality of semiconductor manufacturing apparatuses in the semiconductor manufacturing equipment, and a loading module provided as a transferable structure including a manipulator for supplying materials to or performing maintenance on any one of the plurality of semiconductor manufacturing apparatuses, and docked to and transferred by the autonomous mobile module, wherein, in the autonomous mobile module, a male coupler rotatably protruding from a docking surface of the autonomous mobile module so as to be inserted into a female coupler of the loading module is flexibly supported by a first elastic member.