Conductive Line Layout Using Angled Ends for Tighter IC Spacing

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Solution Overview

Problem

The increasing density and complexity of integrated circuits (ICs) pose challenges in design and fabrication due to difficult spacing requirements between conductive lines, leading to inefficiencies in layout and increased manufacturing costs.

Innovation Solution

The design of conductive lines with angled end portions and segments that deviate from the primary direction, maintaining distances greater than design rule distances, allows for optimized layout and reduced space between conductive lines without violating design rules.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conductive lines are placed closer together to increase IC density, then productivity and cost efficiency improve, but manufacturing precision and design rule compliance deteriorate

Engineering Contradiction:

ImproveIC manufacturing efficiencyVSAvoidspacing between conductive lines

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The conductive line ends are designed with asymmetric angled configurations rather than symmetric perpendicular ends. The first conductive line has a first angle at its end, while the second conductive line has a second angle at its end, where the angles are different from each other and from 90 degrees. This asymmetric design allows the lines to be positioned closer together while maintaining adequate spacing at the angled interfaces, thereby increasing IC density without violating design rules.

Inventive Principle:

Principle #4Asymmetry

Solution Approach 2:

Instead of only varying the horizontal spacing between conductive lines, the invention introduces angular orientation as an additional dimensional parameter. By controlling the angles of the conductive line ends relative to each other, the design creates extra degrees of freedom in the layout space, allowing closer packing while maintaining manufacturing precision through angular control rather than solely relying on linear distance constraints.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If conventional perpendicular conductive line ends are used, then manufacturing simplicity is maintained, but layout flexibility and area utilization deteriorate

Engineering Contradiction:

Improveconductive line fabrication simplicityVSAvoidrequired IC area

Core Design Contradiction:

Ease of manufactureVSArea of stationary object

Solution Approach 1:

The invention changes the geometric parameters of conductive line ends from fixed perpendicular (90-degree) angles to variable angled configurations. The first conductive line has a first angle at its end, and the second conductive line has a second angle at its end, where these angles can be optimized for specific layout requirements. This parameter change enables better area utilization and layout flexibility while maintaining ease of manufacture through standardized angular patterning processes.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS20250336814A1Device and method of manufacturing the same

Publication Date: 2025.10.30 NAN YA TECH

AI summary

The present disclosure provides a device including a first conductive line and a second conductive line. The first conductive line includes a first segment that extends along a first direction and has a first side forming a first angle smaller than the right angle with the first direction. The second conductive line includes a first segment deviating from the first direction with the first angle. The first segment of the second conductive line is separated from the first side of the first segment of the first conductive line by a first distance greater than or equal to a first design rule distance.