Annular MEMS Sensor Electrode Layout for Stable Compact Detection
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Solution Overview
Problem
Existing MEMS sensors face challenges in achieving high accuracy and stable electrical connections while maintaining a reduced size, which affects their detection capabilities.
Innovation Solution
The sensor design incorporates a movable portion with annular structures and electrodes of varying widths and configurations to facilitate stable electrical connections and precise vibration detection, even in a compact form factor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the sensor size is reduced, then the device becomes more compact, but the electrical connection stability and detection accuracy deteriorate
Solution Approach 1:
The sensor structure is segmented into a fixed portion and a movable portion with distinct functional zones. The fixed portion contains the base and fixed electrodes, while the movable portion contains the movable electrode and detection structures. This segmentation allows each part to be optimized independently for its specific function while maintaining overall compactness.
Solution Approach 2:
The patent transitions from planar electrode arrangements to a three-dimensional configuration where the movable electrode is positioned at a specific distance from the fixed electrodes in the vertical dimension. This dimensional change enables stable electrical connections and accurate detection within a reduced horizontal footprint, effectively packing more functionality into a smaller overall volume.
2Volume of moving object
If the sensor size is reduced, then the device becomes more compact, but the detection accuracy deteriorates
Solution Approach 1:
The movable electrode is designed with non-uniform thickness, having a first thickness in a first region and a second thickness in a second region. This local quality variation optimizes the detection sensitivity in different areas, allowing the sensor to maintain high detection accuracy despite the reduced overall size. The varying thickness enables different regions to contribute differently to the detection function.
Solution Approach 2:
By introducing vertical positioning of the movable electrode at a controlled distance from the fixed electrodes, the patent creates a three-dimensional detection space. This allows the sensor to achieve accurate detection measurements without requiring a larger horizontal area, thus maintaining detection accuracy while reducing overall sensor footprint.
3Ease of manufacture
If the electrode configuration is simplified, then the manufacturing becomes easier, but the vibration detection capability deteriorates
Solution Approach 1:
The fixed electrodes are designed with dual functionality: they serve as both drive electrodes for generating vibrational motion and as detection electrodes for sensing the vibration state. This multi-functionality simplifies the overall electrode configuration by eliminating the need for separate drive and detection electrode sets, while still maintaining effective vibration detection capability through the movable electrode's interaction with the fixed electrodes.
Solution Approach 2:
The movable electrode's non-uniform thickness distribution creates local variations in mechanical and electrical properties that enhance vibration detection sensitivity. The first thickness region and second thickness region provide different functional characteristics that together enable effective vibration sensing without requiring complex multi-electrode configurations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables high-accuracy detection with reduced noise and improved sensor characteristics by ensuring stable electrical connections and optimal vibration states, even in a minimized size.
Implementation Method 1
the movable portion includes a first annular portion and a second annular portion... capable of vibrating
Implementation Method 2
a first fixed electrode fixed to the first face, and a first opposing fixed electrode fixed to the first face... capable of vibrating... wherein a first gap is provided between the first face and the movable portion
Data Source
Figure 1
Figure 2
Figure 3~4
AI summary
According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, a movable portion supported by the fixed portion, a first fixed electrode, and a first opposing fixed electrode. The fixed portion includes a first center in a first plane parallel to the first face. The movable portion includes first and second annular portions. The first fixed electrode includes first and second regions. The first opposing fixed electrode includes first and second opposing regions. The first region is provided between the second annular portion and the first annular portion. The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion. The second opposing region is provided between the second annular portion and the second region.