Spatially orthogonal surface acoustic waves let a robust proof mass measure angular rate under extreme linear acceleration without mechanical stops.
Alternating drive pulses with tuned duty cycles cut third-harmonic excitation in MEMS gyroscope resonators while preserving stable resonance.
A common anchoring area and double-differential capacitive layout make vertical-axis MEMS gyroscope sensing less sensitive to substrate deformation.
Strong coupling links and flexible beams keep MEMS gyroscope mass blocks synchronized, improving anti-interference and working stability.
A force angle tracking mode updates vibration direction setpoints to avoid lock-in while preserving continuous gyroscope output across a wide range.
An annular X/Y proof mass and Z decoupled masses separate Z sensing from X/Y modes, improving Coriolis conversion and precision.
A short-circuit switch bypasses the integrator capacitor at startup to stop bias buildup and keep vibratory gyro frequency control stable.
Matching electrode and wiring capacitance during switching cuts crosstalk bias and improves angular velocity detection accuracy.
Matched wiring patterns and bonding wires let switched gyro electrodes cancel crosstalk bias more completely and improve angular velocity detection.
Separate first and second mass blocks with flexible beams reduce drive-detect mode interference, improving gyroscope accuracy and sensitivity.
Insulating members and stopper gaps limit movable-portion displacement, preventing damage while preserving accurate vibration detection.