Vibratory Gyroscope Wiring Layout for Capacitance-Matched Electrode Switching
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Solution Overview
Problem
Conventional gyroscopes suffer from residual bias components due to electrical crosstalk resulting from capacitance differences in electrode interchanges, which are not adequately canceled, affecting angular velocity detection accuracy.
Innovation Solution
A vibratory gyro element with adjustable wiring patterns, thickness of insulating layers, and electrical elements to match capacitance components before and after electrode interchanges, using switching units to ensure equal capacitance across interchanged electrodes and wirings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electrode interchange is performed to cancel bias components, then angular velocity detection accuracy is improved, but residual bias components remain due to capacitance differences
Solution Approach 1:
The patent adjusts wiring patterns, insulating layer thickness, and electrical elements to modify capacitance parameters. By changing these physical parameters, the capacitance components of interchanged electrodes and wirings are made equal, enabling complete bias cancellation when electrodes are interchanged.
Solution Approach 2:
The patent creates equipotential conditions by ensuring equal capacitance values for corresponding electrodes and wirings before and after interchange. This equipotentiality in terms of capacitance ensures that no potential difference or crosstalk signal remains after electrode interchange, allowing complete bias component cancellation.
2Reliability
If wiring patterns and insulating layer thickness are adjusted to match capacitance components, then bias component cancellation is improved, but device complexity increases
Solution Approach 1:
The patent applies local quality adjustments by modifying specific wiring patterns and insulating layer thickness only in regions where capacitance matching is required. Rather than redesigning the entire device, localized adjustments are made to achieve the desired capacitance equality, minimizing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Sufficient cancellation of bias components due to electrical crosstalk improves the accuracy of angular velocity detection by minimizing signal differences before and after electrode interchanges.
Implementation Method 1
a primary drive electrode PD to generate a primary vibration in the vibrator 20
Implementation Method 2
a primary detection electrode PPO to detect the primary vibration
Implementation Method 3
a secondary detection electrode SPO to detect a secondary vibration of the vibrator 20
Implementation Method 4
a secondary drive electrode SD to drive the vibrator 20 to cancel out the secondary vibration
Implementation Method 5
at least one of patterns of the wirings 70, a thickness of the insulating layer 54 of the substrate 1 on which the wirings 70 are arranged, or another electrical element that increases or decreases capacitance is adjusted such that capacitance components of the electrodes 40 and the corresponding wirings 70 to be interchanged with each other are matched to each other
Data Source
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AI summary
In a vibratory gyro element (100), patterns of wirings (70) on a fixed portion (10) are adjusted such that capacitance components of electrodes (40) and corresponding wirings to be interchanged with each other are matched to each other between switching units (170) and a vibrator (20).