Vibration Sensor Stopper Structure for Stable Movable Portions
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Solution Overview
Problem
Sensors and electronic devices require stable characteristics to function effectively, but existing designs often suffer from excessive displacement and damage to movable components, leading to instability and reduced reliability.
Innovation Solution
Incorporating insulating members and stoppers between base and movable regions in sensors to suppress excessive displacement, using materials like silicon oxide and insulating films to stabilize the movable portions, and integrating these with controllers for accurate vibration detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If insulating members and stoppers are added to suppress excessive displacement, then reliability is improved, but device complexity increases
Solution Approach 1:
An insulating member is introduced as an intermediary element positioned between the movable portion and the base body. This insulating member serves as a mediator that prevents direct contact and excessive displacement while maintaining the functional gaps necessary for sensor operation. The insulating member acts as a buffer that limits movement without interfering with the electrostatic detection mechanism.
Solution Approach 2:
The stopper structure is designed with a predetermined position and shape that preliminarily defines the maximum displacement limit of the movable portion. By pre-configuring the stopper geometry during manufacturing, the system establishes displacement constraints before operation begins, preventing excessive movement without requiring active control mechanisms.
2Measurement precision
If gaps between base and movable portions are reduced to improve precision, then measurement precision is improved, but risk of damage increases
Solution Approach 1:
The insulating member is strategically positioned at specific locations where displacement control is most critical, rather than uniformly distributing protective elements throughout the structure. The stopper geometry is locally optimized to provide just enough constraint to prevent damage while maintaining the gap distances necessary for accurate vibration detection in the measurement regions.
Solution Approach 2:
The insulating member serves as a protective intermediary that allows smaller gaps to be used for improved measurement precision while preventing direct contact that would cause damage. The insulating material provides electrical isolation and mechanical buffering, enabling the system to operate with tighter tolerances without increasing damage risk.
Data Source
AI summary
According to one embodiment, a sensor includes a base body including a first face, a first support portion, a first movable portion, and a first insulating member. The first face includes a first base region, a second base region, and a third base region. The first support portion is fixed to the third base region. The first movable portion is supported by the first support portion. The first movable portion includes a first movable region and a second movable region. A first gap is provided between the first base region and the first movable region. The first insulating member is fixed to the second base region, and located between the second base region and the second movable region in a first direction from the third base region to the first support portion. A second gap is provided between the first insulating member and the second movable region.