Annular Vacuum Gripper for Continuous High-Speed Substrate Sorting
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Solution Overview
Problem
Existing semiconductor substrate sorting systems face limitations in throughput due to indexing motions that require powerful motors, induce vibrations, and increase maintenance frequencies, hindering high-speed handling and processing.
Innovation Solution
A substrate sorter utilizing an annular gripper with continuously rotating vacuum applicators that hold substrates in place while rotating, allowing simultaneous picking and transfer without indexing, reducing the need for powerful motors and minimizing vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If indexing motion is used to rotate the picking arm in a stop-and-go manner, then substrates can be picked up and transferred, but the throughput is limited and maintenance frequency increases
Solution Approach 1:
The picking arm rotates continuously without stopping to pick up substrates, eliminating the start-stop indexing motion. This continuous rotation maintains constant substrate transfer capability, increasing throughput while reducing maintenance frequency by avoiding repeated acceleration and deceleration cycles
2Productivity
If indexing motion with frequent acceleration and deceleration is used, then substrate picking is achieved, but powerful motors and brakes are required and vibrations are induced
Solution Approach 1:
The picking arm rotates at constant speed without acceleration and deceleration phases, eliminating the harmful vibrations caused by indexing motion while maintaining high substrate handling speed through continuous operation
3Productivity
If indexing motion is used to allow substrate pickup, then sorting is achieved, but the start and stop motion limits throughput
Solution Approach 1:
The picking arm rotates continuously without stopping between substrate pickups, eliminating the time loss associated with indexing cycles. Substrates are picked up during the continuous rotation, maximizing sorting speed without idle time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves high throughput by continuously rotating vacuum applicators to pick up and transfer substrates, enhancing sorting efficiency and reducing maintenance needs, capable of sorting at least 15,000 substrates per hour.
Implementation Method 1
a plurality of vacuum applicators concyclically disposed around an axis... while one or more of the plurality of vacuum applicators hold the substrate against the rotator
Data Source
AI summary
Disclosed herein are a substrate sorter, an inspection and sorting system having the substrate sorter, and a method for the inspection and sorting system. The substrate sorter includes an annular gripper comprising a rotator and a plurality of vacuum applicators concyclically disposed around an axis, a carrier operable to move a substrate towards the rotator and into a loading region below the rotator, and an actuator coupled with the annular gripper and operable to rotate the rotator about the axis relative to the plurality of vacuum applicators while one or more of the plurality of vacuum applicators hold the substrate against the rotator.