Anodic Oxide Film for Uniform Fluid Diffusion
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Solution Overview
Problem
Conventional fluid permeable members, such as diffusers, face challenges in uniformly distributing fluids due to non-uniform hole formation, which is difficult to manufacture with small inner widths and high hole density.
Innovation Solution
A fluid permeable member featuring a support plate with a mesh structure and a fluid permeable anodic oxide film, where the film is formed by anodizing metal to create regularly-arranged pores and permeation holes, allowing for uniform fluid diffusion without additional components and supporting the film while allowing fluid passage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the inner width of holes is reduced and the number of holes is increased to achieve uniform fluid distribution, then fluid diffusion uniformity is improved, but manufacturing difficulty increases
Solution Approach 1:
The patent applies porous anodic oxide film formed on the support plate through electrochemical anodization. This creates a uniform porous structure with controlled pore size and distribution, eliminating the need to manually drill or machine numerous small holes. The anodic oxide process naturally produces uniform pores across the entire surface, achieving both high manufacturing precision and ease of manufacture.
Solution Approach 2:
The patent utilizes parameter changes in the anodization process (electrical current, electrolyte composition, temperature, time) to control the pore size, density, and uniformity of the porous film. By adjusting these parameters, the desired fluid diffusion characteristics are achieved without complex mechanical hole formation processes.
2Ease of manufacture
If conventional methods are used to form holes in the diffuser, then manufacturing is simpler, but uniform fluid injection cannot be achieved
Solution Approach 1:
The support plate is transformed into a porous anodic oxide film through electrochemical treatment. This porous structure provides uniform fluid distribution characteristics that conventional hole-drilling methods cannot achieve, while the entire process is accomplished through a single surface treatment step rather than repeated machining operations.
Solution Approach 2:
The patent replaces mechanical hole formation methods (drilling, punching, etching) with an electrochemical anodization process. This substitution eliminates the limitations of mechanical methods in achieving uniform hole distribution and size, while maintaining manufacturing simplicity through a single-step surface treatment process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables uniform fluid diffusion and supports the anodic oxide film, ensuring smooth fluid flow without obstruction, facilitating applications like semiconductor wafer manufacturing.
Implementation Method 1
a fluid permeable anodic oxide film disposed on the support plate... the fluid permeable anodic oxide film may have a plurality of regularly-arranged pores formed by anodizing a metal
Implementation Method 2
a fluid permeable member for allowing a fluid to pass therethrough and uniformly diffusing the fluid
Data Source
AI summary
A fluid permeable member includes a support body provided in a lower portion thereof with a support plate having a fluid permeable through-hole, and a fluid permeable anodic oxide film disposed on the support plate.