Inductively Coupled Antenna Lid Gap-Free Attachment

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Solution Overview

Problem

Conventional plasma treatment apparatuses face contamination issues due to plasma generation between antenna conductors and lids, leading to discharge and contamination within the vacuum chamber.

Innovation Solution

The plasma treatment apparatus features an inductively coupling antenna unit with antenna conductors attached to a lid without gaps, using a reciprocating circuit and a thin, insulating lid to prevent discharge and contamination, while reducing the size and thickness of the lid for mechanical strength and cost efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If antenna conductors are attached to the lid with gaps, then the attachment process is simpler and more cost-effective, but discharge occurs in the gaps causing plasma generation and contamination inside the vacuum chamber

Engineering Contradiction:

Improveattachment process simplicityVSAvoidcontamination inside vacuum chamber

Core Design Contradiction:

Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

An insulating lid is introduced as an intermediary component between the antenna conductors and the vacuum chamber environment. The lid provides both electrical insulation to prevent discharge and physical containment to prevent contamination, while the antenna conductors are attached to the lid without gaps in the insulating material itself.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

A thin insulating lid is used to cover the antenna conductors, providing contamination prevention and discharge prevention through its insulating properties. The thin film structure maintains electrical isolation while allowing the antenna unit to be compact and cost-effective.

Inventive Principle:

Principle #30Flexible shells and thin films

2Reliability

If a thick lid is used to prevent discharge and contamination, then reliability is improved, but the size and cost of the apparatus increase

Engineering Contradiction:

Improvedischarge preventionVSAvoidlid thickness

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

A thin insulating lid is used instead of a thick lid, achieving reliable discharge prevention and contamination containment through the insulating material's electrical properties rather than relying on thickness alone. This reduces the overall size and complexity of the antenna unit.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The insulating properties of the lid material are optimized to provide sufficient electrical insulation and contamination prevention with minimal thickness. By changing the material parameters (insulating properties) rather than increasing geometric parameters (thickness), reliability is improved without increasing device complexity.

Inventive Principle:

Principle #35Parameter changes

3Ease of manufacture

If conventional antenna units are used with gaps between conductors and lid, then manufacturing is easier, but plasma generation causes contamination and operational issues

Engineering Contradiction:

Improveantenna unit assemblyVSAvoidcontamination prevention

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The insulating lid serves as a mediator that is attached to the vacuum chamber wall, with antenna conductors then attached to the lid. This intermediary structure prevents direct contact between conductors and the chamber environment, eliminating discharge and contamination issues while maintaining manufacturing simplicity.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

A thin insulating lid is used to cover the antenna conductors, providing a simple yet effective barrier that prevents contamination and discharge. The thin film approach maintains ease of manufacture while ensuring reliable operation.

Inventive Principle:

Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively prevents plasma generation between the antenna and lid, reduces contamination, and allows for the use of elongated antenna units with reduced impedance, enhancing the apparatus's operational efficiency and cost-effectiveness.

Implementation Method 1

applies a high frequency current to an inductively coupling antenna unit disposed in a vacuum chamber, thereby, generating plasma in the vacuum chamber

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

a lid that covers an opening formed in a wall surface of the vacuum chamber... one or a plurality of antenna conductors is attached to the lid without a gap in which discharge occurs

Methodology Applied

Scientific EffectElectrical insulation: Dielectric

Data Source

PatentUS11164728B2Plasma treatment apparatus and driving method thereof

Publication Date: 2021.11.02 PLASMA ION ASSIST

AI summary

A plasma treatment apparatus is provided to suppress plasma from being generated between an antenna conductor and a lid to prevent contamination inside a vacuum chamber and to put an elongated antenna unit to practical use. The plasma treatment apparatus includes a vacuum chamber that accommodates a treatment target; an inductively coupling antenna unit that generates plasma in the vacuum chamber; and a high frequency power source that supplies a high frequency power to the inductively coupling antenna unit. The inductively coupling antenna unit has one or a plurality of antenna conductors and a lid that covers an opening formed in a wall surface of the vacuum chamber, and the one or plurality of antenna conductors are attached to the lid without a gap where discharge may occur.