Antifuse Memory Cell Programming Path Bypasses Read Transistor

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Solution Overview

Problem

Conventional nonvolatile memory cells with antifuse components and read transistors are prone to damage during programming due to high voltages affecting the gate dielectric layer, leading to reduced lifetime and failure of memory cells.

Innovation Solution

A nonvolatile memory cell design incorporating an antifuse component and read transistor structure where the programming current bypasses the read transistor, reducing damage during programming, and utilizing a single polysilicon process for integration into existing logic transistor flows without requiring double polysilicon or stacked gate members.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional nonvolatile memory cells use high voltage programming through the read transistor, then programming capability is achieved, but the gate dielectric layer suffers damage leading to reduced lifetime and failure

Engineering Contradiction:
Improvememory cell lifetimeVSAvoidgate dielectric damage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The memory cell is segmented into distinct functional paths: a programming path through the antifuse component that bypasses the read transistor, and a read path through the read transistor that operates at low voltage. This segmentation allows each component to operate in its optimal voltage regime, preventing gate dielectric damage to the read transistor while maintaining programming capability through the antifuse component.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The antifuse component acts as an intermediary element that handles the high voltage programming function, protecting the read transistor from direct exposure to damaging high voltages. The antifuse component serves as a mediator that enables programming capability while isolating the sensitive read transistor from harmful electrical stress.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If double polysilicon or stacked gate members are used to protect against high voltage damage, then reliability is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvememory cell durabilityVSAvoidtransistor structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The harmful high voltage programming function is extracted from the read transistor and assigned to a separate antifuse component. This extraction eliminates the need for complex protective structures like double polysilicon or stacked gate members in the read transistor, as the read transistor no longer needs to withstand high voltages. The complexity is reduced by separating the programming function from the read transistor structure.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of making the read transistor more complex and robust to handle high voltages directly, the invention inverts the approach by making the read transistor simple and sensitive, and placing the high voltage handling function in a separate antifuse component. This inversion simplifies the read transistor structure while maintaining reliability.

Inventive Principle:
Principle #13The other way round (Inversion)

3Ease of manufacture

If existing logic transistor processes are used without modification, then manufacturing simplicity is maintained, but integration of antifuse components and read transistors becomes difficult

Engineering Contradiction:
Improveprocess compatibilityVSAvoidmemory cell structure flexibility
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The antifuse component is designed with multi-functionality, serving both as a programming element capable of withstanding high voltages and as an integral part of the memory cell structure. This universal design allows the same basic process flow to be used for both logic transistors and memory cells, enabling easy integration into existing CMOS processes without requiring separate specialized fabrication lines.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention utilizes parameter changes in the antifuse component, such as varying the thickness and material composition of the gate dielectric layer, to enable the component to withstand high programming voltages while maintaining compatibility with standard CMOS fabrication processes. These parameter adjustments allow the memory cell to be integrated into existing logic transistor processes with minimal modifications.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the reliability and longevity of nonvolatile memory cells by minimizing damage to the read transistor during programming and allows for flexible physical design tailored to existing process flows, maintaining compatibility with existing logic processes.

Implementation Method 1

The nonvolatile memory cells include one-time programmable ("OTP") memory cells with an antifuse component. Before programming, the antifuse component is in an open or relatively high resistive state, and after programming, the antifuse component is in a relatively conductive state

Methodology Applied
Scientific EffectAntifuse: Antifuse

Data Source

PatentUS9048237B2Electronic device including a nonvolatile memory structure having an antifuse component
Publication Date: 2015.06.02 SEMICON COMPONENTS IND LLC
  • US9048237B2 patent drawing
  • US9048237B2 patent drawing
  • US9048237B2 patent drawing

AI summary

An electronic device can include a nonvolatile memory cell, wherein the nonvolatile memory cell can include a substrate, an access transistor, a read transistor, and an antifuse component. Each of the access and read transistors can include source/drain regions at least partly within the substrate, a gate dielectric layer overlying the substrate, and a gate electrode overlying the gate dielectric layer. An antifuse component can include a first electrode lying at least partly within the substrate, an antifuse dielectric layer overlying the substrate, and a second electrode overlying the antifuse dielectric layer. The second electrode of the antifuse component can be coupled to one of the source/drain regions of the access transistor and to the gate electrode of the read transistor. In an embodiment, the antifuse component can be in the form of a transistor structure. The electronic device can be formed using a single polysilicon process.