Semiconductor Testing Apparatus with APCM Leakage Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The challenge in semiconductor integrated circuit testing is the significant leakage current in switch devices due to voltage differences across deactivated switches, which affects the efficiency and reliability of the testing process.
Innovation Solution
Implementing a control circuit that sequentially activates switch devices using flip-flops and an auxiliary control circuit to provide equal power supply voltages to both terminals of deactivated switches, reducing leakage current by eliminating subthreshold current.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If switch devices are used in the testing apparatus, then the testing process can be performed, but leakage current occurs due to voltage differences across deactivated switches
Solution Approach 1:
The patent applies equipotentiality by providing equal power supply voltages to both terminals of deactivated switches through the auxiliary control circuit. This eliminates voltage differences across the switches, thereby eliminating subthreshold leakage current while maintaining the functionality of the testing apparatus.
Solution Approach 2:
The patent changes the power supply voltage parameter dynamically based on switch state. The auxiliary control circuit adjusts the power supply voltage to match the potential at the other terminal of each switch, transforming the leakage current problem into a controlled parameter adjustment problem that resolves the contradiction between reliability and harmful leakage current.
2Object-generated harmful factors
If power supply voltage is applied to both terminals of deactivated switches, then leakage current is reduced, but device complexity increases
Solution Approach 1:
The auxiliary control circuit performs multiple functions: it controls the power supply voltage for deactivated switches, eliminates leakage current, and maintains system reliability. By consolidating these functions into a single control mechanism, the patent reduces overall device complexity despite the added functionality.
Solution Approach 2:
The control circuit automatically adjusts power supply voltages based on the operational state of switches without requiring external intervention. This self-regulating mechanism eliminates the need for complex manual control systems while effectively reducing leakage current.
Data Source
AI summary
The present disclosure provides a testing apparatus, which includes a plurality of devices under test (DUTs) and an advanced process control monitor (APCM). The APCM includes a switch circuit, a control circuit, a detection circuit, and an auxiliary control circuit. The switch circuit includes a plurality of switch devices corresponding to the DUTs. The control circuit includes a plurality of control devices corresponding to the switch devices, and is configured to sequentially activate one of the switch devices during a test procedure of the testing apparatus. The detection circuit is configured to provide a first power supply voltage to a first terminal of each switch device. The auxiliary control circuit is configured to provide a second power supply voltage to a second terminal of each switch device deactivated the control circuit.